Patent Application
Provisional
App. No. 63/018,566
· Confirmation No. 4637
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment Processing
Inventors:
Ting Xie, Haochen Li, Shuang Meng, Luke Zhang, Dave Kohl, Shawming Ma, Haichun Yang, Hua Chung, Ryan M. Pakulski, Michael X. Yang
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2020-05-08 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-05-01 | PA.. |
Power of Attorney | 3 | View | |
| 2020-05-01 | ADS |
Application Data Sheet | 11 | View | |
| 2020-05-01 | SPEC |
Specification | 18 | View | |
| 2020-05-01 | CLM |
Claims | 4 | View | |
| 2020-05-01 | ABST |
Abstract | 1 | View | |
| 2020-05-01 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2020-05-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-05-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2020-05-01 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2020-05-01 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Ting Xie
Fremont, CA
Haochen Li
Fremont, CA
Shuang Meng
Newark, CA
Luke Zhang
Fremont, CA
Dave Kohl
Fremont, CA
Shawming Ma
Sunnyvale, CA
Haichun Yang
San Jose, CA
Hua Chung
Saratoga, CA
Ryan M. Pakulski
Brentwood, CA
Michael X. Yang
Palo Alto, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-369-P
- Confirmation No.
- 4637
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-23
from
CHUNG, HUA,
KOHL, DAVE,
LI, HAOCHEN,
MENG, SHUANG,
PAKULSKI, RYAN M.,
YANG, HAICHUN,
YANG, MICHAEL X.,
MA, SHAWMING,
XIE, TING,
ZHANG, LUKE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-05-20
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Quick Facts
- App. No.
- 63/018,566
- Filed
- 2020-05-01
External Links