Patent Application
Provisional
App. No. 63/130,257
· Confirmation No. 7776
Monitoring Radical Particle Concentration Using Mass Spectrometry
Applicant:
MKS Instruments, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-01-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-12-23 | ADS |
Application Data Sheet | 9 | View | |
| 2020-12-23 | SPEC |
Specification | 15 | View | |
| 2020-12-23 | CLM |
Claims | 5 | View | |
| 2020-12-23 | ABST |
Abstract | 1 | View | |
| 2020-12-23 | APPENDIX |
Appendix to the specification | 8 | View | |
| 2020-12-23 | DRW |
Drawings-only black and white line drawings | 20 | View | |
| 2020-12-23 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2020-12-23 | APPENDIX |
Appendix to the specification | 33 | View | |
| 2020-12-23 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-12-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 21005
- Docket No.
- 5089.3101-000
- Confirmation No.
- 7776
Child
PCT
Claims priority from a provisional application
→
PCT/US2021/072969
Filed 2021-12-16
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 17/644,704
· US 11,971,386
Filed 2021-12-16
· Patented Case
Child
Claims priority from a provisional application
→
App. 18/621,600
· US 12,265,057
Filed 2024-03-29
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/130,257
- Filed
- 2020-12-23
External Links