IP Library › Patent Application 63163589
Patent Application Provisional
App. No. 63/163,589 · Confirmation No. 4137

SUBSTRATE WITH FLUORINATED YTTRIUM COATINGS, AND METHODS OF PREPARING AND USING THE SUBSTRATES

Applicant: ENTEGRIS, INC.
Provisional Application Expired
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 Code Description Pages PDF
2021-03-26 APP.FILE.REC Filing Receipt 3 View
2021-03-19 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2021-03-19 PA.. Power of Attorney 1 View
2021-03-19 TR.PROV Provisional Cover Sheet (SB16) 3 View
2021-03-19 TRAN.LET Transmittal Letter 2 View
2021-03-19 ADS Application Data Sheet 9 View
2021-03-19 SPEC Specification 30 View
2021-03-19 CLM Claims 4 View
2021-03-19 ABST Abstract 1 View
2021-03-19 DRW.NONBW Drawings-other than black and white line drawings 4 View
2021-03-19 WFEE Fee Worksheet (SB06) 2 View
2021-03-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-03-19 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
63/163,589
Filed
2021-03-19