IP Library › Patent Application 63177643
Patent Application Provisional
App. No. 63/177,643 · Confirmation No. 5248

SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINING FILMS

Applicant: ENTEGRIS, INC.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-05-11 APP.FILE.REC Filing Receipt 3 View
2021-04-21 PA.. Power of Attorney 1 View
2021-04-21 TR.PROV Provisional Cover Sheet (SB16) 4 View
2021-04-21 TRAN.LET Transmittal Letter 2 View
2021-04-21 ADS Application Data Sheet 9 View
2021-04-21 SPEC Specification 10 View
2021-04-21 CLM Claims 3 View
2021-04-21 ABST Abstract 1 View
2021-04-21 DRW.NONBW Drawings-other than black and white line drawings 4 View
2021-04-21 WFEE Fee Worksheet (SB06) 2 View
2021-04-21 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-04-21 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2021-04-21 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
63/177,643
Filed
2021-04-21