Segmented Multi-Channel, Backside Illuminated, Solid State Detector with a Through-Hole for Detecting Secondary and Backscattered Electrons

Inventors: John Gerling, Lawrence Muray, Alan Brodie, James Spallas, Marcel Trimpl

Provisional Application Expired

	Code	Description	Pages	PDF
2021-06-15	`APP.FILE.REC`	Filing Receipt	3	View
2021-06-09	`TR.PROV`	Provisional Cover Sheet (SB16)	4	View
2021-06-09	`SPEC`	Specification	7	View
2021-06-09	`WFEE`	Fee Worksheet (SB06)	2	View
2021-06-09	`N417`	Electronic Filing System Acknowledgment Receipt	2	View

Inventors

John Gerling Livermore, CA

Lawrence Muray Moraga, CA

Alan Brodie Palo Alto, CA

James Spallas Milpitas, CA

Marcel Trimpl San Jose, CA

Attorneys & Agents of Record

JUSTIN SPURLOCK Reg. 73658 Attorney · CANTOR COLBURN LLP

KEVIN MCANDREWS Reg. 34496 Agent · KLA - TENCOR CORP.

JEREMY KOSCIELNY Reg. 70672 Attorney · KLA CORPORATION

Prosecution

KLA CORPORATION

from BRODIE, ALAN, GERLING, JOHN, TRIMPL, MARCEL, MURAY, LAWRENCE, SPALLAS, JAMES

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2021-09-30

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