IP Library › Patent Application 63218351
Patent Application Provisional Small
App. No. 63/218,351 · Confirmation No. 8440

ENHANCED EUV PHOTORESISTS AND METHODS OF THEIR USE

Provisional Application Expired
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 Code Description Pages PDF
2022-01-04 OATH Oath or Declaration filed 16 View
2021-10-08 APP.FILE.REC Filing Receipt 3 View
2021-08-27 WFEE Fee Worksheet (SB06) 2 View
2021-08-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-08-17 TR.PROV Provisional Cover Sheet (SB16) 1 View
2021-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-08-17 DRW Drawings-only black and white line drawings 13 View
2021-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-07-14 APP.FILE.REC Filing Receipt 3 View
2021-07-14 NTC.MISS.PRT Notice to File Missing Parts 2 View
2021-07-04 TR.PROV Provisional Cover Sheet (SB16) 3 View
2021-07-04 WFEE Fee Worksheet (SB06) 2 View
2021-07-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-07-04 SPEC Specification 5 View
2021-07-04 CLM Claims 3 View
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Quick Facts
App. No.
63/218,351
Filed
2021-07-04