Patent Application
Provisional
App. No. 63/278,837
· Confirmation No. 1073
Methods and Systems for Feedback Control in Plasma Processing Using Radical Sensing
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-02-23 | OATH |
Oath or Declaration filed | 8 | View | |
| 2022-02-23 | OATH |
Oath or Declaration filed | 8 | View | |
| 2022-02-03 | OATH |
Oath or Declaration filed | 14 | View | |
| 2021-11-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2021-11-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2021-11-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2021-11-12 | SPEC |
Specification | 10 | View | |
| 2021-11-12 | CLM |
Claims | 1 | View | |
| 2021-11-12 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2021-11-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-11-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Keith K. Koai
Acton, MA
Chenglong Yang
Fremont,, CA
Guy Rosenzweig
Cambridge, MA
Jimmy Liu
San Jose, CA
James Blessing
Morgan Hill, CA
Michael Harris
Hudson, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- 0237-800WIL-21P
- Confirmation No.
- 1073
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/278,837
- Filed
- 2021-11-12
External Links