Patent Application
Provisional
App. No. 63/293,465
· Confirmation No. 9574
Wafer Humidity Control Device
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-01-03 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2021-12-23 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2021-12-23 | ADS |
Application Data Sheet | 9 | View | |
| 2021-12-23 | SPEC |
Specification | 9 | View | |
| 2021-12-23 | CLM |
Claims | 3 | View | |
| 2021-12-23 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-12-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Ren-Hau Wu
New Taipei City, TAIWAN
Cheng-Kang Hu
Kaohsiung City, TAIWAN
Yi-Fam Shiu
Toufen City, TAIWAN
Cheng-Lung Wu
Zhunan Township, TAIWAN
Hsu-Shui Liu
Pingjhen City, TAIWAN
Attorneys & Agents of Record
Prosecution
- Customer No.
- 27885
- Docket No.
- TSMC 200061USP1
- Confirmation No.
- 9574
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/293,465
- Filed
- 2021-12-23
External Links