Patent Application
Provisional
App. No. 63/636,378
· Confirmation No. 3581
UV Assisted Strip (UVAS) of Photoresist to Realize ESG and 3D Integration Targets
Applicant:
VEECO INSTRUMENTS INC
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2024-06-05 | ADS |
Application Data Sheet | 6 | View | |
| 2024-06-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-04-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2024-04-30 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2024-04-19 | SPEC |
Specification | — | View | |
| 2024-04-19 | ADS |
Application Data Sheet | 6 | View | |
| 2024-04-19 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-04-19 | CLM |
Claims | 5 | View | |
| 2024-04-19 | SPEC |
Specification | 15 | View | |
| 2024-04-19 | ABST |
Abstract | 1 | View | |
| 2024-04-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2024-04-19 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2024-04-19 | DRW |
Drawings-only black and white line drawings | 14 | View |
Inventors
John Taddei
Marco Island, FL
Phillip Tyler
Horsham, PA
Matthew Villa
Plainview, NY
James Kuter
Plainview, NY
Robert Kurucz
Plainview, NY
Kevin Donnelly
Horsham, PA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 76808
- Docket No.
- 05055/012535-US0
- Confirmation No.
- 3581
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2024-06-05
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Quick Facts
- App. No.
- 63/636,378
- Filed
- 2024-04-19
External Links