Patent Application
Utility
App. No. 19/183,129
· Confirmation No. 1769
UV ASSISTED STRIP (UVAS) OF PHOTORESIST TO REALIZE ESG AND 3D INTEGRATION TARGETS
Inventors:
John Taddei, Phillip Tyler, Matthew Villa, James Kuter, Robert Kurucz, Kevin Donnelly, Kevin Kauermann, Edward Budriss, Simon Bird
Applicant:
VEECO INSTRUMENTS INC.
Docketed New Case - Ready for Examination
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Code | Description | Pages | ||
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| 2025-11-20 | A.PE |
Preliminary Amendment | — | View | |
| 2025-11-20 | SPEC |
Specification | 23 | View | |
| 2025-11-20 | A.PE |
Preliminary Amendment | 1 | View | |
| 2025-11-20 | SPEC |
Specification | 1 | View | |
| 2025-11-20 | CLM |
Claims | 4 | View | |
| 2025-11-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2025-11-20 | SPEC |
Specification | 23 | View | |
| 2025-11-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-11-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-10-23 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2025-10-20 | OATH |
Oath or Declaration filed | 52 | View | |
| 2025-09-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2025-09-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-07-15 | OATH |
Oath or Declaration filed | 63 | View | |
| 2025-06-26 | OATH |
Oath or Declaration filed | 1 | View | |
| 2025-06-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-06-25 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2025-06-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-06-25 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2025-06-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-06-20 | ADS.CORR |
Application Data Sheet to update/correct info | 5 | View | |
| 2025-06-20 | OATH |
Oath or Declaration filed | 11 | View | |
| 2025-06-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-06-20 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-06-20 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2025-06-16 | OATH |
Oath or Declaration filed | 43 | View | |
| 2025-04-23 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2025-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-04-23 | NTC.MISS.PRT |
Notice to File Missing Parts | 3 | View | |
| 2025-04-23 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-04-18 | APP.TEXT |
Application body structured text document | — | View | |
| 2025-04-18 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2025-04-18 | DRW |
Drawings-only black and white line drawings | 31 | View | |
| 2025-04-18 | ADS |
Application Data Sheet | 11 | View | |
| 2025-04-18 | PA.. |
Power of Attorney | 2 | View | |
| 2025-04-18 | SPEC |
Specification | 23 | View | |
| 2025-04-18 | CLM |
Claims | 4 | View | |
| 2025-04-18 | ABST |
Abstract | 1 | View | |
| 2025-04-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-04-18 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
John Taddei
Marco Island, FL
Phillip Tyler
Horsham, PA
Matthew Villa
Philadelphia, PA
James Kuter
Allentown, PA
Robert Kurucz
Oley, PA
Kevin Donnelly
Horsham, PA
Kevin Kauermann
Southampton, PA
Edward Budriss
Hopewell, NJ
Simon Bird
Hatboro, PA
Attorneys & Agents of Record
Classification
USPC
438/5
G03F7/42
G03F7/7085
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 76808
- Docket No.
- 05055/012535-US2
- Confirmation No.
- 1769
Publication
- Pub. No.
- US20250328079A1
- Pub. Date
- 2025-10-23
from
DONNELLY, KEVIN,
BUDRISS, EDWARD,
KURUCZ, ROBERT,
TYLER, PHILLIP,
VILLA, MATTHEW,
BIRD, SIMON,
KAUERMANN, KEVIN,
KUTER, JAMES,
TADDEI, JOHN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2025-12-12
SECURITY INTEREST
Recorded 2025-06-16
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Quick Facts
- App. No.
- 19/183,129
- Filed
- 2025-04-18
- Pub. No.
- US20250328079A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
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