Patent Application
Provisional
App. No. 63/672,799
· Confirmation No. 9926
UV ASSISTED STRIP (UVAS) OF PHOTORESIST TO REALIZE ESG AND 3D INTEGRATION TARGETS
Inventors:
John Taddei, Phillip Tyler, Matthew Villa, James Kuter, Robert Kurucz, Kevin Donnelly, Kevin Kauermann, Edward Budriss, Simon Bird
Applicant:
VEECO INSTRUMENTS INC.
Provisional Application Expired
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2024-07-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2024-07-30 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2024-07-18 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2024-07-18 | SPEC |
Specification | — | View | |
| 2024-07-18 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-07-18 | ADS |
Application Data Sheet | 7 | View | |
| 2024-07-18 | DRW |
Drawings-only black and white line drawings | 32 | View | |
| 2024-07-18 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2024-07-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2024-07-18 | SPEC |
Specification | 21 | View | |
| 2024-07-18 | CLM |
Claims | 7 | View | |
| 2024-07-18 | ABST |
Abstract | 1 | View | |
| 2024-07-18 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
John Taddei
Marco Island, FL
Phillip Tyler
Horsham, PA
Matthew Villa
Philadelphia, PA
James Kuter
Allentown, PA
Robert Kurucz
Pipersville, PA
Kevin Donnelly
Horsham, PA
Kevin Kauermann
Southampton, PA
Edward Budriss
Hopewell, NJ
Simon Bird
Hatboro, PA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 76808
- Docket No.
- 05055/012535-US1
- Confirmation No.
- 9926
from
KURUCZ, ROBERT,
BIRD, SIMON,
BUDRISS, EDWARD,
DONNELLY, KEVIN,
KAUERMANN, KEVIN,
KUTER, JAMES,
TADDEI, JOHN,
TYLER, PHILLIP,
VILLA, MATTHEW
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2024-07-25
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Quick Facts
- App. No.
- 63/672,799
- Filed
- 2024-07-18
External Links