Substrate holder, plating apparatus, and plating method
A substrate holder holds a substrate while hermetically sealing an outer circumferential edge and a reverse side of the substrate and exposing a surface of the substrate. The substrate holder has a base and a cover having an opening defined therein and positioned to place the substrate between the base and the cover. An attracting mechanism couples the base and the cover to each other to hold the substrate between the base and the cover, with the surface of the substrate being exposed through the opening.
1. A substrate holder for holding a substrate, comprising:
a seal ring for sealing an outer circumferential edge and a reverse side of the substrate, while exposing a surface of the substrate;
a base;
a cover having an opening defined therein; and
an attracting mechanism for coupling said base and said cover to each other to hold said substrate positioned between said base and said cover, with said surface of the substrate being exposed through said opening.
2. A substrate holder according to claim 1 , wherein said attracting mechanism comprises a vacuum attracting mechanism.
3. A substrate holder according to claim 1 , wherein said base has a provisionally supporting mechanism for provisionally supporting said substrate on said base.
4. A substrate holder according to claim 1 , further comprising:
a positioning mechanism provided between said base and said cover for positioning said substrate disposed and held between said base and said cover.
5. A substrate holder for holding a substrate, comprising:
a seal ring for sealing an outer circumferential edge and a reverse side of the substrate, while exposing a surface to be plated of the substrate; and
a base and a cover lying vertically and confronting each other;
wherein said base is adapted to attract the substrate in a vertical orientation under vacuum, and secure said cover to said base in covering relation to the surface of the substrate with said seal ring pressed against said substrate.
6. A substrate holder according to claim 5 , wherein said cover has a positioning mechanism for receiving and positioning said substrate attracted under vacuum by said base.