Mask and method of manufacturing the same, electro-luminescence device and method of manufacturing the same, and electronic instrument
A method of manufacturing a mask includes: attaching a second substrate having a plurality of penetrating holes to a first substrate having an opening. The second substrate is attached such that the penetrating holes are positioned within the opening. A groove is formed on a surface of the first substrate facing the second substrate. The groove is utilized to form a flow path between the first and second substrates.
1. A method of manufacturing a mask comprising:
attaching to a frame having an opening a screen plate having a plurality of penetrating holes arranged to form a mask pattern such that the penetrating holes are positioned within the opening, the penetrating holes set to perpendicularly connect holes formed in opposite surfaces of the screen plate;
forming a groove on at least one of a surface of the frame facing the screen plate and a surface of the screen plate facing the frame; and
utilizing the groove to form a flow path between the frame and the screen plate.
2. The manufacturing method of the mask as defined in claim 1 , wherein at least part of the groove is formed around the opening.
3. The manufacturing method of the mask as defined in claim 1 , wherein the frame and the screen plate are joined by anode coupling.
4. The manufacturing method of the mask as defined in claim 2 , wherein the frame and the screen plate are joined by anode coupling.
5. The manufacturing method of the mask as defined in claim 1 , wherein the steps of forming the screen plate includes:
forming the penetrating holes in a silicon wafer; and
cutting the silicon wafer into a shape corresponding to the screen plate.
6. The manufacturing method of the mask as defined in claim 1 , further comprising:
forming a magnetic film over the screen plate.
7. The manufacturing method of the mask as defined in claim 1 , wherein:
a plurality of the screen plates are attached to the frame;
the frame has a plurality of the openings; and
each of the screen plates is attached to corresponding one of the openings.
8. The manufacturing method of the mask as defined in claim 7 , further comprising:
polishing surfaces of the screen plates attached to the frame to have a uniform height.
9. A mask comprising:
a frame having an opening; and
a screen plate attached to the frame and having a plurality of penetrating holes arranged to form a mask pattern, the penetrating holes set to perpendicularly connect holes formed in opposite surfaces of the screen plate, wherein:
the screen plate is attached to the frame such that the penetrating holes are positioned within the opening;
a groove is formed on at least one of a surface of the frame facing the screen plate and a surface of the screen plate facing the frame; and
the groove is utilized to form a flow path between the frame and the screen plate.
10. The mask as defined in claim 9 , wherein at least part of the groove is formed around the opening.
11. The mask as defined in claim 9 , wherein the frame and the screen plate are joined by anode coupling.
12. The mask as defined in claim 10 , wherein the frame and the screen plate are joined by anode coupling.
13. The mask as defined in claim 9 , wherein a magnetic film is formed over the screen plate.
14. The mask as defined in claim 9 , wherein:
a plurality of the openings are formed in the frame;
a plurality of the screen plates are attached to the frame; and
each of the screen plates is attached to corresponding one of the openings.
15. The mask as defined in claim 14 , wherein surfaces of the screen plates attached to the frame are polished to have a uniform height.
16. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 9 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
17. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 10 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
18. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 11 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
19. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 12 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
20. A method of manufacturing a mask comprising:
attaching to a frame having an opening a screen plate having a plurality of penetrating holes arranged to form a mask pattern such that the penetrating holes are positioned within the opening, the penetrating holes set to be tapered;
forming a groove on at least one of a surface of the frame facing the screen plate and a surface of the screen plate facing the frame; and
utilizing the groove to form a flow path between the frame and the screen plate.
21. The manufacturing method of the mask as defined in claim 20 , wherein at least part of the groove is formed around the opening.
22. The manufacturing method of the mask as defined in claim 20 , wherein the frame and the screen plate are joined by anode coupling.
23. The manufacturing method of the mask as defined in claim 21 , wherein the frame and the screen plate are joined by anode coupling.
24. The manufacturing method of the mask as defined in claim 20 , wherein the steps of forming the screen plate includes:
forming the penetrating holes in a silicon wafer; and
cutting the silicon wafer into a shape corresponding to the screen plate.
25. The manufacturing method of the mask as defined in claim 20 , further comprising:
forming a magnetic film over the screen plate.
26. The manufacturing method of the mask as defined in claim 20 , wherein:
a plurality of the screen plates are attached to the frame;
the frame has a plurality of the openings; and
each of the screen plates is attached to corresponding one of the openings.
27. The manufacturing method of the mask as defined in claim 26 , further comprising:
polishing surfaces of the screen plates attached to the frame to have a uniform height.
28. A mask comprising:
a frame having an opening; and
a screen plate attached to the frame and having a plurality of penetrating holes arranged to form a mask pattern, the penetrating holes set to be tapered, wherein:
the screen plate is attached to the frame such that the penetrating holes are positioned within the opening;
a groove is formed on at least one of a surface of the frame facing the screen plate and a surface of the screen plate facing the frame; and
the groove is utilized to form a flow path between the frame and the screen plate.
29. The mask as defined in claim 28 , wherein at least part of the groove is formed around the opening.
30. The mask as defined in claim 28 , wherein the frame and the screen plate are joined by anode coupling.
31. The mask as defined in claim 29 , wherein the frame and the screen plate are joined by anode coupling.
32. The mask as defined in claim 28 , wherein a magnetic film is formed over the screen plate.
33. The mask as defined in claim 28 , wherein:
a plurality of the openings are formed in the frame;
a plurality of the screen plates are attached to the frame; and
each of the screen plates is attached to corresponding one of the openings.
34. The mask as defined in claim 33 , wherein surfaces of the screen plates attached to the frame are polished to have a uniform height.
35. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 28 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
36. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 29 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
37. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 30 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.
38. A method of manufacturing an electro-luminescence device comprising:
forming a film of a light emitting material using the mask as defined in claim 31 ; and
cooling the mask by causing a fluid to flow through the flow path of the mask, in the step of forming a film of a light emitting material.