Method of forming grating microstrutures by anodic oxidation
A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.
1. A method of manufacturing an element having a microstructure, comprising steps of:
forming a metal layer on a substrate;
periodically forming mask layers on the surface of said metal layer; and
anodically oxidizing the surface of said metal layer formed with the mask while opposing this surface to a cathode surface thereby forming a metal oxide film having a linear grating groove pattern in the region between masks.
2. The method of manufacturing an element having a microstructure according to claim 1 , wherein
said step of forming said metal oxide film having said grating groove pattern includes a step of anodically oxidizing the surface of said metal layer formed with said mask layers while opposing this surface with said cathode surface thereby forming micropores on the surface of said metal oxide film formed with no said mask layer and thereafter enlarging said micropores by etching thereby forming said metal oxide film having said grating groove pattern.
3. The method of manufacturing an element having a microstructure according to claim 1 , further comprising a step of etching said metal layer through masks of said mask layers thereby forming etching grooves in advance of said step of forming said metal oxide film having said grating groove pattern.
4. The method of manufacturing an element having a microstructure according to claim 3 , setting the width of said etching grooves and the width of said mask layers to satisfy a relational expression L≠2S assuming that S represents the width of said etching grooves and L represents the width of said mask layers respectively.
5. The method of manufacturing an element having a microstructure according to claim 1 , further comprising a step of forming a transparent conductor film on said substrate in advance of said step of forming said metal layer on said substrate.
6. The method of manufacturing an element having a microstructure according to claim 1 , wherein
said step of forming said metal oxide film having said linear grating groove pattern includes a step of forming said metal oxide film having rectilinear grating groove pattern.
7. The method of manufacturing an element having a microstructure according to claim 1 , wherein
said step of forming said metal oxide film having said linear grating groove pattern includes a step of forming said metal oxide film having curvilinear grating groove pattern.
8. The method of manufacturing an element having a microstructure according to claim 1 , wherein said step of anodically oxidizing the surface of the metal layer further comprises:
forming the metal oxide film having micropores and connecting the micropores with each other thereby forming the metal oxide film having the linear grating groove pattern.
9. A method of manufacturing an element having a microstructure, comprising steps of:
forming a metal layer on a substrate;
anodically oxidizing the surface of said metal layer while opposing this surface to a cathode surface thereby forming a metal oxide film having micropores;
periodically forming mask layers on the surface of said metal oxide film; and
enlarging said micropores existing in the region between masks by etching thereby forming a metal oxide film having a linear grating groove pattern.
10. The method of manufacturing an element having a microstructure according to claim 9 , wherein
said step of forming said metal oxide film having micropores includes a step of forming said metal oxide film having micropores arranged in the form of a triangular lattice.
11. The method of manufacturing an element having a microstructure according to claim 9 , further comprising a step of forming a transparent conductor film on said substrate in advance of said step of forming said metal layer on said substrate.
12. The method of manufacturing an element having a microstructure according to claim 9 , wherein
said step of forming said metal oxide film having said linear grating groove pattern includes a step of forming said metal oxide film having rectilinear grating groove pattern.
13. The method of manufacturing an element having a microstructure according to claim 9 , wherein
said step of forming said metal oxide film having said linear grating groove pattern includes a step of forming said metal oxide film having curvilinear grating groove pattern.
14. A method of manufacturing an element having a microstructure, comprising steps of:
forming a metal layer on a substrate;
anodically oxidizing the surface of said metal layer while opposing this surface to a cathode surface thereby forming a metal oxide film having micropores;
periodically forming mask layers on the surface of said metal oxide film; and
connecting said micropores with each other thereby forming a metal oxide film having a linear grating groove pattern.