Selective promotion for resolution enhancement techniques
View Patent ↗A tool for optimizing the layout of a microdevice adds fragmentation points to polygons in a first hierarchical database layer in a manner suitable for application of a tool to apply a resolution enhancement technique (RET) such as optical and process correction (OPC). Portions of polygons in a database level that interact with polygons of a second level in the database are promoted to the second database level, and refragmented. The RET operates on the polygons of the first and second levels of the database to determine how polygons of each of the first and second levels should be adjusted, if necessary, such that the layout is optimized.
1. A method of preparing data that describes the layout of a microdevice to be created by a photolithographic process for the application of a resolution enhancement technique, comprising the acts of:
reading a microdevice layout that is stored in a hierarchical database having a number of levels, each level including definitions of polygons corresponding to features in the microdevice, each polygon being defined as a number of vertices;
analyzing interacting polygons in the database;
promoting polygons or portions thereof such that polygons that interact are defined on the same hierarchical level of the database;
fragmenting the polygons in a level of the database containing any promoted polygons so that the vertices that define each polygon are optimized for the application of the resolution enhancement techniques (RET).
2. The method of claim 1 , additionally comprising: fragmenting a portion of the layout for the application of an RET prior to the step of analyzing the interacting polygons.
3. The method of claim 1 , wherein the act of promoting polygons includes:
defining a copy of a polygon or portion thereof in another database level containing an interacting polygon without altering the fragmentation of the polygons in the level from which the promotions are made.
4. The method of claim 1 , in which the promoted portions of polygons are edge segments.
5. The method of claim 4 , further comprising:
keeping a record of which edge segments in a database level have had copies promoted to another hierarchy level.
6. The method of claim 4 , further comprising:
keeping a record of which edge segments in a database level have been promoted from another hierarchy level.
7. A method of preparing data for the application of an optical and process correction (OPC) tool to a layout stored in a hierarchical database that defines a microdevice to be manufactured lithographically, comprising the acts of:
fragmenting polygons in the levels of the hierarchical database so that each polygon is optimized for the application of the OPC tool;
selectively promoting interacting polygons or portions thereof such that interacting polygons are defined on the same database level, wherein said selective promotion does not affect fragmentation of the polygons or portions thereof that are promoted; and
refragmenting the polygons and any promoted polygons or portions thereof for the application of the OPC tool.
8. The method of claim 7 , in which the promoted portions of polygons are edge segments.
9. A method of preparing data stored within a hierarchical database prior to performing optical and process correction (OPC) on the data, wherein the data defines a number of polygons that describe a microdevice to be manufactured lithographically, comprising:
selectively promoting copies of polygons or portions thereof in the database such that interacting polygons or portions thereof are defined in the same database level; and
fragmenting polygons defined in a level of the hierarchical database including any promoted polygons or portions thereof for the application of an OPC tool.
10. The method of claim 9 , in which the promoted portions of polygons are edge segments.
11. A computer readable medium containing a sequence of instructions that are executable by a computer system to perform a method of preparing data that describes the layout of a microdevice to be created by a photolithographic process for the application of a resolution enhancement technique, by performing the acts of:
reading a microdevice layout that is stored in a hierarchical database having a number of levels, each level including definitions of polygons corresponding to features in the microdevice, each polygon being defined as a number of vertices;
analyzing interacting polygons in the database;
promoting polygons or portions thereof such that polygons that interact are defined on the same hierarchical level of the database; and
fragmenting the polygons in a level of the database containing any promoted polygons so that the vertices that define each polygon are optimized for the application of the resolution enhancement technique.
12. A computer readable medium containing a sequence of instructions that are executable by a computer system to perform a method of preparing data for the application of an optical and process correction (OPC) tool to a layout stored in a hierarchical database that defines a microdevice to be manufactured lithographically, comprising the acts of:
fragmenting polygons in the levels of the hierarchical database so that each polygon is optimized for the application of the OPC tool;
selectively promoting interacting polygons or portions thereof such that interacting polygons are defined on the same database level, wherein said selective promotion does not affect fragmentation of the polygons or portions thereof that are promoted; and
refragmenting the polygons and any promoted polygons or portions thereof for the application of the OPC tool.
13. A computer readable medium containing a sequence of instructions that are executable by a computer system to perform a method of preparing data that is stored within a hierarchical database that defines a number of polygons describing a microdevice to be manufactured lithographically prior to using an optical and process correction (OPC) tool on the data by:
selectively promoting copies of polygons or portions thereof in the database such that interacting polygons or portions thereof are defined in the same database level; and
fragmenting polygons defined in a level of the hierarchical database including any promoted polygons or portions thereof for the application of the OPC tool.