Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope

1. A specimen enclosure assembly comprising:

an enclosure structure defining an enclosed specimen placement volume and defining an aperture communicating with said enclosed specimen placement volume;

an electron beam permeable and gas impermeable layer covering said aperture and sealing said specimen placement volume from a volume outside said enclosure; and

a pressure relief device communicating with said enclosed specimen placement volume.

2. A specimen enclosure assembly according to claim 1 and wherein said layer is formed from a material selected from the group consisting of: polyimide, polyamide, polyamide-imide, polyethylene, polypyrrole, PARLODION, COLLODION, KAPTON, FORMVAR, VINYLEC, BUTVAR, PIOLOFORM, silicon dioxide, silicon monoxide and carbon.

3. A specimen enclosure assembly according to claim 1 and also comprising an apertured mechanical support for said layer, which defines openings having at least one dimension of no less than 100 microns.

4. A specimen enclosure assembly according to claim 1 and wherein said enclosure structure and said layer are constructed and configured so as to ensure a specimen is engaged with said layer.

5. A specimen enclosure assembly according to claim 1 and wherein said layer generally is gas impermeable up to at least a pressure gradient of one atmosphere.

6. A specimen enclosure assembly according to claim 1 and wherein said enclosed specimen placement volume has dimensions all of which exceed 10 microns and defines an aperture communicating with said enclosed specimen placement volume.

7. A specimen enclosure assembly according to claim 1 and wherein said layer generally is permeable to electrons having energies in excess of 2 KeV.

8. A specimen enclosure assembly according to claim 1 and also composing a light collector operative to collect light generated from an interaction between electrons and a specimen at a location within said enclosed specimen placement volume.

9. A specimen enclosure assembly comprising:

a specimen structure defining an enclosed specimen placement volume;

at least one electron beam permeable, fluid impermeable, vacuum tolerant layer sealing said specimen placement volume from a volume outside said specimen structure; and

a light collector operative to collect light generated from an interaction between electrons and a specimen at a location within said enclosed specimen placement volume.

10. A specimen enclosure assembly according to claim 9 and wherein said layer is formed from a material selected from the group consisting of: polyamide, polymide, polyamide-imide, polyethylene, polypyrrole, PARLODION, COLLODION, KAPTON, FORMVAR, VINYLEC, BUTVAR, PIOLOFORM, silicon dioxide, silicon monoxide and carbon.

11. A specimen enclosure assembly according to claim 9 and also comprising an apertured mechanical support for said at least one layer, which defines openings having at least one dimension of no less than 100 microns.

12. A specimen enclosure assembly according to claim 9 and wherein said at least one layer generally is gas impermeable up to at least a pressure gradient of one atmosphere.

13. A specimen enclosure assembly according to claim 9 and wherein said enclosed specimen placement volume has dimensions all of which exceed 10 microns and defines an aperture communicating with said enclosed specimen placement volume.

14. A specimen enclosure assembly according to claim 9 and wherein said layer generally is permeable to electrons having energies in excess of 2 KeV.

15. A specimen enclosure assembly according to claim 9 and also comprising a pressure relief device communicating with said enclosed specimen placement volume.

16. A method for performing scanning electron microscopy comprising:

providing a beam of electrons to a specimen region maintained at a pressure below the vapor pressure of water;

placing a specimen in a specimen enclosure having an aperture and defining an enclosed specimen placement volume sealed at said aperture by an electron beam permeable, fluid impermeable, vacuum tolerant cover;

placing said specimen enclosure in said beam of electrons; and

detecting backscattered electrons from interaction of said beam of electrons with said specimen.

17. A method for performing scanning electron microscopy comprising:

providing a beam of electrons to a specimen region maintained at a pressure below the vapor pressure of water;

placing a specimen in a specimen enclosure assembly disposed in the specimen region at a pressure below the vapor pressure of water and comprising:

an enclosure structure defining an enclosed specimen placement volume and defining an aperture communicating with said enclosed specimen placement volume;

an electron beam permeable and gas impermeable layer covering said aperture and sealing said specimen placement volume from a volume outside said enclosure,

said enclosure structure and said layer being constructed and configured so as to permit impingement of electron beams into said specimen placement volume;

placing said specimen enclosure assembly in said beam of electrons; and

analyzing results of interactions of said beam of electrons with said specimen.

18. A method for performing scanning electron microscopy according to claim 17 and wherein analysis of said results of interactions of said beam of electrons with said specimen employs X-rays.

19. A method for performing scanning electron microscopy according to claim 17 and wherein analysis of said results of interactions of said beam of electrons with said specimen employs light.

20. A method for performing scanning electron microscopy according to claim 17 and wherein analysis of said results of interactions of said beam of electrons with said specimen employs electrons.