Transducer arrays with an integrated sensor and methods of use
Methods and systems for obtaining ultrasound and sensing other patient characteristics are provided from summary. One or more sensors are provided in a same transducer probe as an array of elements. For example, sensors are formed on a same semiconductor substrate, such as a silicon substrate, as microelectromechanical devices or a capacitive membrane ultrasonic transducer (CMUT). As another example, a sensor is provided separate from or attached to transducer materials. Possible sensors include temperature, pressure, microphone, chemical and/or other sensors.
1. A transducer probe for ultrasound detection, the transducer probe comprising:
a probe housing;
an imaging array of transducer elements connected with the probe housing, the transducer elements being on or within a substrate; and
a temperature sensor integrated on or within the substrate.
2. The probe of claim 1 wherein the transducer elements comprise a capacitive membrane ultrasonic transducer and the substrate comprises a semiconductor substrate.
3. The probe of claim 2 wherein the temperature sensor comprises a microelectromechanical device formed on the semiconductor substrate.
4. The probe of claim 2 wherein the temperature sensor comprises at least in part an integrated circuit component on the semiconductor substrate.
5. The probe of claim 1 wherein the temperature sensor is integrated between at least two of the transducer elements.
6. The probe of claim 1 wherein the temperature sensor is positioned to measure a temperature of the probe housing.
7. The probe of claim 1 wherein the temperature sensor is positioned to measure a temperature of a subject being examined.
8. The probe of claim 1 wherein the temperature sensor integrated on or within the substrate comprises the temperature sensor formed on or within the substrate.
9. The probe of claim 8 wherein the temperature sensor is formed on the substrate.
10. The probe of claim 8 wherein the temperature sensor is formed within the substrate.