IP Library Granted Patent US 7,323,804
Granted Patent B2
US 7,323,804 · App. 10/829,413 · Granted Jan 29, 2008

Linear output, closed loop mover assembly

Assignee: Bookham Technology plc
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Quick Facts
Patent No.
US 7,323,804
App. No.
10/829,413
Filed
Apr 21, 2004
Granted
Jan 29, 2008
Kind
B2
Art Unit
2834
USPC
310/323.02
Abstract

A mover assembly ( 16 ) that moves or positions an object ( 12 ) along a first axis includes a motor ( 20 ) and a coupling assembly ( 22 ). The motor ( 20 ) includes a motor output ( 332 ) that is moved along the first axis and about the first axis. The coupling assembly ( 22 ) includes a stage ( 344 ) that couples the motor output ( 332 ) to the object ( 12 ) and a stage guide ( 346 ) that guides the motion of the stage ( 344 ) along the first axis. In one embodiment, the stage guide ( 346 ) is a linear bearing that allows for motion of the stage ( 344 ) along the first axis and inhibits motion of the stage ( 344 ) about the first axis, along a second axis and along a third axis. Additionally, the coupling assembly ( 22 ) can include a measurement system ( 28 ) that monitors the movement of the stage ( 344 ).

Claims (34)

1. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves along the first axis and about the first axis in a step-like fashion; and

a coupling assembly including a stage that couples the motor output to the object and a stage guide that guides the motion of the stage along the first axis and inhibits motion of the stage about a second axis that is orthogonal to the first axis.

2. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves; and

a coupling assembly including a stage that couples the motor output to the object and a stage guide that guides the motion of the stage along the first axis, wherein the motor output is moved along the first axis and about the first axis and wherein the stage guide is a linear bearing that allows for motion of the stage along the first axis and inhibits motion of the stage about the first, about a second and third axes, along the second axis and along the third axis.

3. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves and a pair of opposed jaw elements that engage the motor output, wherein the motor includes a piezoelectric element that causes rotation of the motor output by moving the jaw elements relative to each other; and

a coupling assembly including a stage that couples the motor output to the object and a stage guide that guides the motion of the stage along the first axis and inhibits motion of the stage about a second axis that is orthogonal to the first axis.

4. The mover assembly of claim 1 further comprising a measurement system that provides information regarding the movement of the stage.

5. The mover assembly of claim 4 wherein the measurement system includes a first component that is secured to and moves with the stage.

6. A precision apparatus including an object and the mover assembly of claim 1 .

7. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves, wherein the motor output is moved along the first axis and about the first axis; and

a coupling assembly including a stage that moves with the motor output, a stage guide that guides the motion of the stage along the first axis and inhibits motion of the stage about the first axis, and a measurement system that provides information regarding the movement of the stage, wherein the stage guide is a linear bearing that allows for motion of the stage along the first axis and inhibits motion of the stage about the first, about a second and third axes, along the second axis and along the third axis.

8. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves along the first axis, wherein the motor output moves in a step-like fashion; and

a coupling assembly including a stage that moves with the motor output, a stage guide that guides the motion of the stage along the first axis and inhibits motion of the stage about the first axis, a resilient member that urges the stage against the motor output, and a measurement system that provides information regarding the movement of the stage.

9. A mover assembly that adjusts a position or shape of an object along a first axis, the mover assembly comprising:

a motor including a motor output that moves and a pair of opposed jaw elements that engage the motor output, wherein the motor includes a piezoelectric element that causes rotation of the motor output by moving the jaw elements relative to each other; and

a coupling assembly including a stage that moves with the motor output, a stage guide that guides the motion of the stage along the first axis and inhibits motion of the stage about the first axis, and a measurement system that provides information regarding the movement of the stage.

10. The mover assembly of claim 7 wherein the measurement system includes a first component that is secured to and moves with the stage.

11. A precision apparatus including an object and the mover assembly of claim 7 .

12. A method for moving or positioning an object, the method comprising the steps of:

providing a motor and a motor output that is moved by the motor along a first axis;

coupling the motor output to the object with a stage; and

guiding the motion of the stage along the first axis and inhibiting motion of the stage about a second axis that is orthogonal to the first axis with a stage guide.

13. The method of claim 12 wherein the step of guiding includes allowing for motion of the stage along the first axis and inhibiting motion of the stage about the first axis, about the second and a third axes, along the second axis and along the third axis.

14. The method of claim 12 further comprising the step of providing information regarding the movement of the stage with a measurement system.

15. The method of claim 14 wherein the step of providing information includes the step of coupling a first component of the measurement system to the stage so that the first component moves with the stage.

16. The mover assembly of claim 1 wherein the coupling assembly further includes a resilient member that urges the stage against the motor output.

17. The mover assembly of claim 16 wherein the motor output includes a bearing at one end that inhibits motion of the stage about the first axis, and wherein the resilient member urges the stage against the bearing.

18. The mover assembly of claim 8 wherein the motor output moves about the first axis.

19. The mover assembly of claim 8 wherein the motor output includes a bearing at one end that inhibits motion of the stage about the first axis, and wherein the resilient member urges the stage against the bearing.

Assignments (14)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2012
From: BOOKHAM TECHNOLOGY PLC
To: NEWPORT CORPORATION
Reel/Frame 027690/0415 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2009
From: BOOKHAM TECHNOLOGY
To: NEWPORT CORPORATION
Reel/Frame 023498/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 21, 2004
From: WILLIAMS, ERIC C.; ARNONE, DAVID F.; SHARMA, MANISH
To: BOOKHAM TECHNOLOGY PLC
Reel/Frame 015261/0302 →
Continuity (2)
Provisional Application 6046487500 · Apr 22, 2003
Related Publication 20040212279A1 · Oct 28, 2004