Thermal-acoustic scanning systems and methods
Systems and methods for identifying thermal response of a test structure. An example of the system includes a device that generates a excitation beam, a scanning device that scans the thermal excitation beam over a test structure, and a detector that detects acoustic waves produced scanning by the test structure. The system also includes a display device that generates and displays an image based on the detected acoustic waves. A second detector detects a reflection of the beam off of the test structure and the display device generates and displays an image based on the detected reflection.
1. A thermal-acoustic imaging apparatus comprising:
a device for generating a continuous wave thermal excitation beam;
a scanning device for scanning the thermal excitation beam over a test structure;
a detector for detecting acoustic waves produced by scanning the test structure;
a display device for generating an image based on the detected acoustic waves; and
a second detector for detecting reflection of the beam off of the test structure, wherein the display device generates an image based on the detected reflection.
2. The apparatus of claim 1 , wherein the device for generating thermal excitation beam includes a laser.
3. The apparatus of claim 1 , wherein scanning device includes a scanning mirror assembly and a lens.
4. The apparatus in claim 1 , wherein the detector for detecting acoustic waves includes a piezoelectric detector.
5. The apparatus of claim 1 , wherein scanning device includes a scanning table.
6. A thermal-acoustic imaging method comprising:
generating a continuous wave thermal excitation beam;
scanning the thermal excitation beam over a test structure;
detecting acoustic waves produced by the test structure;
generating an image based on the detected acoustic waves;
detecting reflection of the beam off of the test structure; and
generating an image based on the detected reflection.
7. The method of claim 6 , wherein the excitation beam includes a laser beam.
8. The method of claim 6 , wherein scanning is performed by a scanning mirror assembly and a lens.
9. The method in claim 6 , wherein detecting acoustic waves includes detecting acoustic waves using a piezoelectric detector.