Pressure sensor
To accurately set a detection axis of a sensor even when the sensor is attached to an inclined surface, provided is: a sensor responsive to an operation to a predetermined detection axis. A sensor device accommodates this sensor 1 and is a lead provided for conduction between a terminal of this sensor device and a mounting board. A mold for fixing the sensor device to set the detection axis of the sensor and a bottom surface of the mold with a desired angle is also provided.
1. A pressure sensor provided by joining, at opposing faces, a first substrate having a movable electrode formed at a diaphragm with a second substrate having an opposed electrode opposed to the movable electrode, wherein:
a slit that peripherally surrounds one of the movable electrode and the opposed electrode is formed on at least one of the first and second substrates.
2. The pressure sensor according to claim 1 , wherein the slit is provided at the opposing face of at least one of the first and second substrates.
3. The pressure sensor according to claim 1 , wherein the slit is formed in a region adjacent to a junction section.
4. The pressure sensor according to claim 1 , wherein the first and second substrates are joined to seal a predetermined region at the opposing face of the diaphragm to provide a pressure reference room.
5. The pressure sensor according to claim 4 , wherein the slit is provided in the pressure reference room.
6. The pressure sensor according to claim 1 , wherein the substrate having the diaphragm uses a crystal plate.
7. The pressure sensor according to claim 6 , wherein the substrate having the diaphragm uses a crystal plate cut by an AT cutting.
8. A pressure sensor provided by joining, at opposing faces, a pressure-receiving substrate having a diaphragm and composed of a crystal plate with an opposing substrate opposed to the pressure-receiving substrate, wherein:
at least one of the two substrates includes a slit; and
the pressure-receiving substrate having the diaphragm uses a crystal plate cut by an AT cutting.