Method of producing substrate having patterned organosilane layer and method of using the substrate having the patterned organosilane layer
Provided are a method of producing a substrate having a patterned organosilane layer and a method of using the substrate having the patterned organosilane layer. The method of producing the substrate having the patterned organosilane layer, includes: coating organosilane on a substrate to obtain an organosilane layer; coating a photoresist material on the organosilane layer; exposing the photoresist material to light through a mask to obtain a patterned surface on the photoresist material; developing an exposed or unexposed region of the photoresist material using a developer; and wet etching a portion of the organosilane layer in the region from which the photoresist material has been removed, using a HF-containing solution as an etchant.
1. A method of producing a substrate having a patterned organosilane layer, comprising:
coating organosilane directly on a substrate to obtain an organosilane layer,
wherein the substrate is made of a material selected from the group consisting of silicon, glass, silica, diamond, quartz, alumina, platinum, gold, aluminum, tungsten, titanium, polyester, polyamide, polyimide, polyether, polysulfone, and fluoropolymer,
wherein the organosilane is selected from the group consisting of aminosilane, epoxysilane, and fluorosilane;
coating a photoresist material on the organosilane layer;
exposing the photoresist material to light through a mask to obtain a patterned surface on the photoresist material;
developing an exposed or unexposed region of the photoresist material using a developer; and
wet etching a portion of the organosilane layer in the region from which the photoresist material has been removed, using a HF-containing solution as an etchant.
2. The method of claim 1 , wherein the amino silane is γ-aminopropyltriethoxysilane (GAPS) or N-(2-aminoethyl)-3-aminopropyltrimethoxysilane.
3. The method of claim 1 , wherein the epoxysilane is (3-glycidoxypropy)trimethoxysilane or 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane.
4. The method of claim 1 , wherein the fluorosilane is 1H,1H,2H,2H-perfluorodecyltriethoxysilane.
5. The method of claim 1 , wherein the substrate is able to be modified to have a hydroxyl group on its surface.
6. The method of claim 5 , wherein the substrate has a layer of SiO 2 , Al 2 O 3 , TiO 2 , or ITO on its surface.
7. The method of claim 6 , wherein when the organosilane layer is coated on the substrate having a layer of SiO 2 on its surface, the portions of the organosilane layer and the SiO 2 layer in the region from which the photoresist material has been removed are simultaneously wet etched using the HF-containing solution as an etchant.
8. The method of claim 1 , wherein the HF-containing solution is a HF solution, a buffered HF solution, or a solution containing HF as a primary component.