Organic light emitting display device and method of fabricating the same
An organic light emitting display device (OLED) and a method of fabricating the same, in which electric field influence between first and second electrodes is reduced in an edge region of a unit pixel. The OLED includes a substrate, and a thin film transistor (TFT) located on the substrate. A passivation layer is located on the TFT over substantially an entire surface of the substrate, and has a via hole for exposing source or drain electrode, and a groove. A first electrode on the passivation layer is in electrical contact with the exposed source or drain electrode through the via hole, and has an edge located in the groove. A pixel defining layer is located on the first electrode and has an opening for exposing a predetermined portion of the first electrode. An organic layer is in contact with the predetermined portion, and a second electrode is formed on the organic layer.
1. An organic light emitting display device (OLED) comprising:
a substrate;
a thin film transistor (TFT) located on the substrate, and having a semiconductor layer, a gate electrode, and source and drain electrodes on the substrate;
a passivation layer located on the TFT and over substantially an entire surface of the substrate, and having a via hole for exposing one electrode of the source and drain electrodes, and a groove;
a first electrode on the passivation layer, the first electrode being in electrical contact with the one electrode of the source and drain electrodes through the via hole, and having an edge located in the groove;
a pixel defining layer located on the first electrode and having an opening for exposing a predetermined portion of the first electrode;
an organic layer having at least one emission layer, a predetermined region of which is in contact with the predetermined portion of the first electrode; and
a second electrode formed on the organic layer.
2. The device according to claim 1 , wherein the passivation layer is made of one selected from a silicon oxide layer, a silicon nitride layer, and a stacked layer of the silicon oxide layer and the silicon nitride layer.
3. The device according to claim 1 , wherein the passivation layer is formed to a thickness of approximately 0.1 μm˜1 μm.
4. The device according to claim 1 , wherein the groove is etched to a depth of approximately 0.05 μm˜0.6 μm.
5. The device according to claim 1 , further comprising a planarization layer on the passivation layer.
6. The device according to claim 5 , wherein the planarization layer is formed of one material selected from a group consisting of polyimid resin, polyamide resin, polyacryl resin, polyphenol resin, silicon-based resin and benzocyclobuthene.
7. The device according to claim 5 , wherein the planarization layer is formed to a thickness of approximately 0.5 μm˜2 μm.
8. The device according to claim 1 , wherein the first electrode comprises an anode or a cathode.
9. The device according to claim 1 , wherein a distance between the edge of the first electrode and the source electrode is approximately 0.5 μm˜4 μm.
10. The device according to claim 1 , wherein the organic layer further includes at least one selected from a group consisting of a hole injection layer, a hole transport layer, a hole blocking layer, an electron transport layer, and an electron injection layer.
11. A method of fabricating an organic light emitting display device (OLED), comprising:
forming a thin film transistor (TFT) having a semiconductor layer, a gate electrode, source and drain regions, and source and drain electrodes, on a substrate;
forming a passivation layer over substantially an entire surface of the substrate having the TFT;
forming a via hole for exposing one electrode of the source and drain electrodes and a groove formed by etching a portion of the passivation layer, on the passivation layer;
forming a first electrode on the passivation layer, the first electrode being in electrical contact with one electrode of the source and drain electrodes through the via hole, and having an edge located in the groove;
forming a pixel defining layer on substantially an entire surface of the substrate, the pixel defining layer having an opening for exposing a predetermined portion of the first electrode;
forming an organic layer having at least an emission layer in the exposed opening of the pixel defining layer; and
forming a second electrode on the organic layer.
12. The method according to claim 11 , wherein the passivation layer is made of one selected from a silicon oxide layer, a silicon nitride layer, and a stacked layer of the silicon oxide layer and the silicon nitride layer.
13. The method according to claim 11 , wherein the passivation layer is formed to a thickness of approximately 0.1 μm˜1 μm.
14. The method according to claim 11 , wherein the groove is etched to a depth of approximately 0.05 μm˜0.6 μm.
15. The method according to claim 11 , wherein the groove and the via hole are concurrently formed using a halftone mask process.
16. The method according to claim 11 , wherein the groove is formed under a process pressure of approximately 5˜300 mTorr using a mixed gas in which an SF 6 or CF 4 gas having an amount which is at least one percent (1%) of an amount of an O 2 gas in terms of volume, is mixed with the O 2 gas.
17. The method according to claim 11 , wherein the OLED further includes a planarization layer on the passivation layer.
18. The method according to claim 17 , wherein the planarization layer is formed of one material selected from a group consisting of polyimid resin, polyamide resin, polyacryl resin, polyphenol resin, silicon-based resin and benzocyclobuthene.
19. The method according to claim 17 , wherein the planarization layer is formed to a thickness of approximately 0.5 μm˜2 μm.
20. The method according to claim 17 , wherein the groove is formed under a process pressure of approximately 5˜300 mTorr by applying a plasma power of at least 500 W, and using a mixed gas in which one gas selected from SF 6 , CF 4 and CHF 3 gases is mixed with an O 2 gas having an amount that is at least one percent (1%) of an amount of the selected gas in terms of volume.
21. The method according to claim 11 , wherein the first electrode comprises an anode or a cathode.
22. The method according to claim 11 , wherein a distance between the edge of the first electrode and the source electrode is approximately 0.05 μm˜4 μm.
23. The method according to claim 11 , wherein the organic layer further includes at least one selected from a group consisting of a hole injection layer, a hole transport layer, a hole blocking layer, an electron transport layer, and an electron injection layer.