Movement detector having six degrees of freedom with three position sensors and method for the production of a sensor

1. A movement detector having six degrees of freedom comprising:

a support; and

three position sensors arranged on the support according to three orthogonal axes, each sensor comprising:

a rigid body having two opposing inside walls:

conducting areas arranged on the rigid body, the conducting areas comprising four conducting areas arranged such that two of the conducting areas are arranged on one of the inside walls and two of the conducting areas are arranged on the opposing inside wall; and

an electrically conducting deformable element that is isolated from the conducting areas when the deformable element is in a rest position, and the deformable element moving from the rest position to an active position in response to a high-speed movement of predetermined direction and orientation,

wherein the deformable element associated with each sensor is in equilibrium around a central part of the deformable element,

wherein the deformable element responds, to a translation along a predetermined axis by bending, causing ends of the deformable element to substantially simultaneously and temporarily contact two conducting areas on a same inside wall, and

wherein the deformable element responds to a rotation around a predetermined axis by pivoting, causing the ends of the deformable element to substantially simultaneously and temporarily contact two conducting areas arranged on opposing inside walls.

2. The detector according to claim 1 , further comprising an electronic processing circuit connected to the conducting areas of the three sensors.

3. The detector according to claim 1 , wherein the deformable element is a beam in equilibrium around transverse median axis of the beam.

4. The detector according to claim 3 , wherein the beam comprises conducting areas arranged at the ends of the beam.

5. The detector according to claim 1 , wherein the deformable element is a disc in equilibrium around central axis of the disc.

6. The detector according to claim 5 , wherein the disc comprises a peripheral conducting area on each face of the disc.

7. The detector according to claim 1 , wherein the deformable element of each of the three sensors is electrically connected to a power supply contact area arranged on the rigid body of the corresponding sensor.

8. The detector according to claim 1 , wherein the deformable element of each of the three sensors is in an equilibrium position corresponding to the rest position of the corresponding sensor for any movement having an acceleration less than or equal to the force of gravity G.

9. The detector according to claim 1 , wherein the rigid body of each of the three sensors comprises two substrates arranged face to face, connected by balls constituting an electrical interconnection between the conducting areas of one of the substrates and output electrical contact areas formed on the other substrate.

10. The detector according to claim 9 , wherein the deformable element includes two deformable half-elements, each of the deformable half-elements corresponding to one of the substrates and comprising a conducting layer, the conducting layer being supported by a central pillar,

wherein the central pillar is formed on a central power supply contact area, that is formed on the corresponding substrate.

11. A method for production of each of the three sensors according to claim 10 , achieved by microelectronics techniques, the method comprising:

forming conducting areas and power supply areas on each of the substrates;

forming an output electrical contact areas on one of the substrates;

forming a central pillar on each of the substrates, the central pillar contacting the power supply contact area and supporting a conducting layer that serves as the deformable half-element;

installing balls on the output electrical contact areas; and

hybridizing the two substrates arranged face to face.