Method for silicon based dielectric chemical vapor deposition
Embodiments of the invention generally provide a method for depositing silicon-containing films. In one embodiment, a method for depositing silicon-containing material film on a substrate includes flowing a nitrogen and carbon containing chemical into a deposition chamber, flowing a silicon-containing source chemical having silicon-nitrogen bonds into the processing chamber, and heating the substrate disposed in the chamber to a temperature less than about 550 degrees Celsius. In another embodiment, the silicon containing chemical is trisilylamine and the nitrogen and carbon containing chemical is (CH 3 ) 3 —N.
1. A method for depositing a silicon-containing film on a substrate, the method comprising:
heating a substrate disposed in a processing chamber to a temperature less than about 550 degrees Celsius;
flowing a silicon-free, nitrogen and carbon containing chemical into the processing chamber, the silicon-free, nitrogen and carbon containing chemical comprising (H 3 C)—N═N—H;
flowing a silicon-containing source chemical with silicon-nitrogen bonds into the processing chamber; and
depositing a silicon and nitrogen containing film on the substrate.
2. The method of claim 1 , wherein the silicon-containing source chemical is at least one of (SiR 3 ) 3 —N, (SiR 3 ) 2 N—N(SiR 3 ) 2 and (SiR 3 )N═(SiR 3 )N, wherein R is hydrogen (H), or a hydrocarbon reagent or a fragment consisting of methyl, ethyl, phenyl, tertiary butyl and their combinations.
3. The method of claim 2 , wherein the R is free of halogens and contains hydrogen.
4. The method of claim 2 , wherein the R includes one or more halogen elements.
5. The method of claim 1 , wherein the silicon-containing source chemical is (SiH 3 ) 3 —N.
6. The method of claim 1 , wherein the silicon-containing source chemical is (SiH 3 ) 2 N—N(SiH 3 ) 2 .
7. The method of claim 1 , wherein the silicon-containing source chemical is (SiH 3 )N═(SiH 3 )N.
8. The method of claim 1 , wherein the silicon-containing source chemical is trisilylamine.
9. The method of claim 1 , wherein the step of heating the substrate further comprises:
heating the substrate to a temperature between about 300 to about 500 degrees Celsius; and
maintaining a pressure within the processing chamber between about 10 to 740 Torr.
10. The method of claim 1 further comprising:
flowing an oxygen precursor into the processing chamber.
11. The method of claim 10 , wherein the oxygen precursor is at least one of atomic-oxygen, oxygen (O 2 ), ozone (O 3 ), H 2 O, H 2 O 2 , organic peroxides, alcohols, N 2 O, NO, NO 2 , N 2 O 5 and derivatives thereof.
12. The method of claim 1 , wherein the step of depositing the silicon-containing film further comprises:
depositing a single atomic layer of silicon-containing material.
13. A method for depositing a silicon-containing film on a substrate, the method comprising:
heating a substrate disposed in a processing chamber to a temperature between about 400-500 degrees Celsius;
flowing a silicon-free, nitrogen and carbon containing chemical into the processing chamber, the silicon-free, nitrogen and carbon containing chemical comprising (H 3 C)—N═N—H;
flowing a silicon-containing source chemical with silicon-nitrogen bonds into the processing chamber, wherein the silicon-containing source chemical is at least one of (SiR 3 ) 3 —N, (SiR 3 ) 2 N—N(SiR 3 ) 2 and (SiR 3 )N═(SiR 3 )N, wherein R is hydrogen (H), or a hydrocarbon reagent or a fragment consisting of methyl, ethyl, phenyl, tertiary butyl and their combinations; and
depositing a silicon and nitrogen containing film on the substrate.
14. The method of claim 13 , wherein the step of heating the substrate further comprises:
heating the substrate to a temperature less than about 450 degrees Celsius.
15. The method of claim 13 , wherein the R is free of halogens and contains hydrogen.
16. The method of claim 13 , wherein the R includes one or more halogen elements.
17. The method of claim 13 , wherein the silicon-containing source chemical is (SiH 3 ) 3 —N.
18. The method of claim 13 , wherein the silicon-containing source chemical is (SiH 3 ) 2 N—N(SiH 3 ) 2 .
19. The method of claim 13 , wherein the silicon-containing source chemical is trisilylamine.
20. The method of claim 13 , wherein the silicon-containing source chemical is trisilylamine.
21. The method of claim 14 , further comprising: flowing an oxygen precursor into the processing chamber.
22. The method of claim 21 , wherein the oxygen precursor is at least one of atomic-oxygen, oxygen (O 2 ), ozone (O 3 ), H 2 O, H 2 O 2 , organic peroxides, alcohols, N 2 O, NO, NO 2 , N 2 O 5 and derivatives thereof.
23. The method of claim 13 , wherein the step of depositing the silicon-containing film further comprises:
depositing a single atomic layer of silicon-containing material.