Ink jet nozzle assembly with linearly constrained actuator
An ink jet nozzle assembly is provided for an inkjet printer. The nozzle assembly includes a wafer substrate arrangement defining an ink supply passage. A drive circuitry layer is formed on the wafer substrate arrangement. An ink chamber structure is formed on the drive circuitry layer. The ink chamber structure defines an ink chamber in fluid communication with the ink supply passage and an ink ejection port in fluid communication with the ink chamber. The ink chamber structure further defines an actuator guide slot. A support extends from the drive circuitry layer at a location external to the nozzle. An elongate, cantilevered thermal bend actuator extends from a fixed end at the support, through the guide slot and terminates in a free end within the ink chamber. The actuator is electrically coupled to the drive circuitry layer so that the drive circuitry layer can actuate bending of the actuator to move the free end, which is constrained to substantially linear motion by the guide slot, and thereby eject ink from the ink ejection port.
1. An ink jet nozzle assembly for an inkjet printer, the nozzle assembly comprising:
a wafer substrate arrangement defining an ink supply passage;
a drive circuitry layer formed on the wafer substrate arrangement;
an ink chamber structure on the drive circuitry layer, the ink chamber structure defining an ink chamber in fluid communication with the ink supply passage and an ink ejection port in fluid communication with the ink chamber, the ink chamber structure further defining an actuator guide slot;
a support extending from the drive circuitry layer at a location external to the nozzle; and
an elongate, cantilevered thermal bend actuator extending from a fixed end at the support, through the guide slot and terminating in a free end within the ink chamber; the actuator comprising a first layer having a first co-efficient of thermal expansion, and a second layer deposited on the first layer which has a second co-efficient of thermal expansion different to said first co-efficient of thermal expansion; the first layer being electrically coupled to the drive circuitry layer so that the drive circuitry layer can actuate bending of the thermal bend actuator to move the free end, which is constrained to substantially linear motion by the guide slot, and thereby eject ink from the ink ejection port.
2. An ink jet nozzle assembly as claimed in claim 1 , wherein the thermal bend actuator comprises a third layer deposited on the second layer so that the second layer is located between the first and third layers, the third layer also having the first co-efficient of thermal expansion.
3. An ink jet nozzle assembly as claimed in claim 2 , wherein the first and third layers comprise titanium nitride or copper nickel alloy material.
4. An ink jet nozzle assembly as claimed in claim 1 , wherein the second layer comprises one of glass, amorphous silicon dioxide and any other like thermal insulating material.
5. An ink jet nozzle assembly as claimed in claim 1 , wherein the free end is an enlarged paddle.
6. An ink jet nozzle assembly as claimed in claim 5 , wherein the paddle defines a raised lip extending along its periphery.
7. An ink jet nozzle assembly as claimed in claim 1 , wherein the ink chamber structure comprises a cylindrical wall and a cover that defines the ink ejection port.