Acoustic wave device and filter
View Patent ↗An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.
1. An acoustic wave device comprising:
a piezoelectric substrate;
a first dielectric film provided on the piezoelectric substrate;
electrodes that are provided on the first dielectric film and excite an acoustic wave; and
a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes
wherein the first dielectric film is disposed between the piezoelectric substrate and the electrodes, and
wherein a temperature coefficient of a dielectric constant of the first dielectric film is smaller than that of the piezoelectric substrate.
2. The acoustic wave device as claimed in claim 1 , further comprising a third dielectric film provided on the second dielectric film, wherein the third dielectric film has
a greater acoustic velocity than that of the second dielectric film.
3. The acoustic wave device as claimed in claim 2 , wherein the third dielectric film comprises aluminum oxide.
4. The acoustic wave device as claimed in claim 1 , wherein the second dielectric film comprises silicon oxide.
5. The acoustic wave device as claimed in claim 1 , wherein the first dielectric film comprises silicon oxide.
6. The acoustic wave device as claimed in claim 1 , wherein the first dielectric film has a relative dielectric constant greater than that of silicon oxide.
7. The acoustic wave device as claimed in claim 1 , wherein the first dielectric film comprises aluminum oxide.
8. The acoustic wave device as claimed in claim 1 , wherein the piezoelectric substrate comprises one of lithium tantalate and lithium niobate.
9. A filter comprising acoustic wave devices, at least one of the acoustic wave devices comprising:
a piezoelectric substrate;
a first dielectric film provided on the piezoelectric substrate;
electrodes that are provided on the first dielectric film and excite an acoustic wave; and
a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes
wherein the first dielectric film is disposed between the piezoelectric substrate and the electrodes, and
wherein a temperature coefficient of a dielectric constant of the first dielectric film is smaller than that of the piezoelectric substrate.