Laser gyro and electronic device using the same
A laser gyro of the present invention includes laser light excitation means (a semiconductor laser device 100 ) that excites first and second laser lights propagating in the opposite directions to each other in a circular ring-shaped path (an optical path 40 ), coupling means (optical waveguides 41 and 42 ) for superimposing the first and the second laser lights, and a photodetector for observing an interference signal generated by the superimposed first and second laser lights.
1. A laser gyro comprising:
a Si substrate;
laser light excitation means formed on the Si substrate and configured to excite first and second laser lights propagating in clockwise and counterclockwise directions in a circular ring-shaped path;
coupling means formed on the Si substrate, said coupling means formed of a SiO 2 multilayer film optical waveguide and configured to superimpose the first and the second laser lights; and
a photodetector disposed on the Si substrate and configured to observe an interference signal generated by the superimposed first and second laser lights, wherein
the laser light excitation means includes a circular ring-shaped optical waveguide formed of a SiO 2 multilayer film and a semiconductor optical amplifier coupled to the circular ring-shaped optical waveguide so that the semiconductor optical amplifier and the circular ring-shaped optical waveguide form the circular ring-shaped path,
the coupling means includes an optical coupler configured to extract the first and the second laser lights from the ring-shaped path, and
the semiconductor optical amplifier and the photodetector are disposed individually in concave portions, each concave portion being formed by removing the multilayer film partly.
2. The laser gyro according to claim 1 ,
wherein the semiconductor optical amplifier is provided with an active layer made of a group III-V semiconductor.
3. The laser gyro according to claim 1 ,
wherein the optical coupler includes one optical waveguide for optical coupling,
the optical waveguide for optical coupling includes a first part, a second part and a third part disposed between the first and the second parts,
the second part is disposed adjacent to the first part and substantially parallel to the first part, and
the third part is disposed adjacent to the circular ring-shaped optical waveguide.
4. The laser gyro according to claim 1 ,
wherein the optical coupler includes first and second optical waveguides for optical coupling,
both a part of the first optical waveguide for optical coupling and a part of the second optical waveguide for optical coupling are disposed adjacent to the circular ring-shaped optical waveguide, and
both another part of the first optical waveguide for optical coupling and another part of the second optical waveguide for optical coupling are disposed adjacent to and substantially parallel to each other.
5. An electronic device comprising the laser gyro according to claim 1 .