Flexible pixel array substrate
The present invention provides a method for fabricating a flexible pixel array substrate as follows. First, a release layer is formed on a rigid substrate. Next, on the release layer, a polymer film is formed, the adhesive strength between the rigid substrate and the release layer being higher than that between the release layer and the polymer film. The polymer film is formed by spin coating a polymer monomer and performing a curing process to form a polymer layer. Afterwards, a pixel array is formed on the polymer film. The polymer film with the pixel array formed thereon is separated from the rigid substrate.
1. A flexible pixel array substrate on a rigid substrate, comprising:
a flexible substrate, on the rigid substrate and having an upper surface and a lower surface;
a pixel array, disposed on the upper surface of the flexible substrate;
at least one film layer, disposed between the lower surface of the flexible substrate and the rigid substrate;
an adhesive layer, between the at least one film layer and the rigid substrate; and
a release layer, between the adhesive layer and the rigid substrate, wherein the adhesive strength between the release layer and the rigid substrate is higher than that between the release layer and the adhesive layer.
2. The flexible pixel array substrate of claim 1 , wherein the film layer comprises a hard coating layer, a water vapor-resistant and oxygen-resistant layer or a combination thereof.
3. The flexible pixel array substrate of claim 2 , wherein the material of the hard coating layer comprises oxide or nitride.
4. The flexible pixel array substrate of claim 2 , wherein the material of the water vapor-resistant and oxygen-resistant layer comprises oxide, nitride, polymer or a multi-layer combination of the above materials.
5. The flexible pixel array substrate of claim 1 , wherein the pixel array comprises an amorphous silicon TFT array (a-Si TFT array), a low-temperature poly silicon TFT array (LTPS TFT array) or an organic TFT array.
6. The flexible pixel array substrate of claim 1 , wherein the flexible substrate comprises a transparent polymer material.