Bipolar electrostatic chuck
A bipolar electrostatic including a chuck main body having a mounting surface; an annular electrode member formed in an annular configuration wit a center opening and fixed onto the mounting surface of the chuck main body though an adhesive layer; an inner electrode member disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and fixed onto the mounting surface through the adhesive layer; and an outer electrode member disposed at a given clearance from the annular electrode member outside of the annular electrode member and fixed onto the mounting surface through the adhesive layer.
1. A bipolar electrostatic chuck, comprising:
a chuck main body having a mounting surface;
an annular electrode member which is formed in an annular configuration with a center opening and is fixed onto the mounting surface;
an inner electrode member which is disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and is fixed onto the mounting surface; and
an outer electrode member which is disposed at a given clearance from the annular electrode member outside of the annular electrode member and is fixed onto the mounting surface
wherein, at the time of assembling, the annular electrode member, the inner electrode member, and the outer electrode member are fixed onto the mounting surface through an adhesive layer, the inner electrode member and the outer electrode member constitute a first electrode, and the annular electrode member constitutes a second electrode, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer, and
wherein the adhesive layer is made of the silicone-based adhesive agent, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer using a release agent.
2. The bipolar electrostatic chuck according to claim 1 , wherein the silicone-based adhesive agent is a gel adhesive agent or an elastomer-based adhesive agent.
3. A bipolar electrostatic chuck, comprising:
a chuck main body having a mounting surface;
an annular electrode member which is formed in an annular configuration with a center opening and is fixed onto the mounting surface;
an inner electrode member which is disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and is fixed onto the mounting surface; and
an outer electrode member which is disposed at a given clearance from the annular electrode member outside of the annular electrode member and is fixed onto the mounting surface
wherein, at the time of assembling, the annular electrode member, the inner electrode member, and the outer electrode member are fixed onto the mounting surface through an adhesive layer, the inner electrode member and the outer electrode member constitute a first electrode, and the annular electrode member constitutes a second electrode, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer, and
wherein the adhesive layer is made of the polyvinyl butyral adhesive agent, and after use, the annular electrode member, the inner electrode member, and the outer electrode member can be separated from the mounting surface by removing the adhesive layer heating at a temperature of about 150° C.
4. The bipolar electrostatic chuck according to claim 1 or 3 , wherein the chuck main body constitutes the first electrode together with the inner electrode member and the outer electrode member.
5. The bipolar electrostatic chuck according to claim 1 or 3 , wherein the mounting surface of the chuck main body has an outer convex portion for positioning the outer electrode member in a heightwise direction with respect to the mounting surface and/or an inner convex portion for positioning the inner electrode member in the heightwise direction with respect to the mounting surface.
6. The bipolar electrostatic chuck according to claim 1 or 3 , wherein positioning pins that position the inner electrode member, the annular electrode member, and the outer electrode member in a horizontal direction with respect to the mounting surface are disposed between the chuck main body, and the inner electrode member, the annular electrode member, and the outer electrode member which are fixed onto the mounting surface of the chuck main body through the adhesive layer, respectively.
7. The bipolar electrostatic chuck according to claim 1 or 3 , wherein at least one of the inner electrode member, the annular electrode member, and the outer electrode member which are fixed onto the mounting surface of the chuck main body through the adhesive layer is fixed onto the mounting surface of the chuck main body in a complementary configuration with each other.
8. The bipolar electrostatic chuck according to claim 1 or 3 , wherein the chuck main body and the annular electrode member have interposed therebetween a positioning spacer for positioning the annular electrode member in the heigthwise direction with respect to the mounting surface.
9. The bipolar electrostatic chuck according to claim 1 or 3 , wherein the inner electrode member, the annular electrode member, and the outer electrode member are made of pure aluminum.