Piezo-electric substrate and manufacturing method of the same
View Patent ↗A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.
1. A piezo-electric substrate comprising:
a base material with a coefficient of linear expansion ranging from 10×10 −6 /K to 20×10 −6 /K having a roughened main surface; and
a film that is provided on the main surface and that is comprised of a material with a coefficient of linear expansion ranging from −1×10 −6 /K to 10×10 −6 /K smaller than the coefficient of linear expansion of the base material;
wherein the film has a porosity ranging from 5% to 40%; and
wherein the base material and the porosity of the film are cooperable to minimize frequency shifts due to temperature.
2. The piezo-electric substrate according to claim 1 , wherein the film is comprised of a laminate of molten or non-molten particles.
3. The piezo-electric substrate according to claim 2 , wherein a size of the particles ranges from 5 μm to 300 μm.
4. The piezo-electric substrate according to claim 1 , wherein the material with the coefficient of linear expansion smaller than the coefficient of linear expansion of the base material is at least one selected from a group consisting of Ti, W, Mo, Ta, Si and alloys thereof, aluminum oxide, silicon oxide, magnesium oxide, zirconium oxide, titanium oxide, silicon carbide, boron carbide, aluminum nitride, silicon nitride and solid solutions of compounds thereof, and mixtures of the metals and compounds.
5. The piezo-electric substrate according to claim 1 , wherein the film has a thickness ranging from 0.05 mm to 2 mm.
6. The piezo-electric substrate according to claim 1 , wherein the base material is comprised of a material selected from a group consisting of lithium tantalate, lithium niobate, quartz, lithium borate and zinc oxide.
7. The piezo-electric substrate according to claim 1 , wherein an undercoat is provided between the base material and the film.
8. A piezo-electric element comprising:
the piezo-electric substrate according to claim 1 ; and
an element provided on another main surface on the side opposite to the roughened main surface of the piezo-electric substrate.