Method for manufacturing transistor and image display device using the same
A method for manufacturing a transistor includes forming a semiconductor layer on a substrate, a first insulation film on the semiconductor layer, and a gate electrode on the first insulation film. The method also includes forming a source region, a channel region, and a drain region in the semiconductor layer and forming a second insulation film on the gate electrode. A source electrode and a drain electrode are formed on the second insulation film and are coupled to the source region and the drain region, respectively. The method further includes coupling the drain electrode to the gate electrode through a contact hole that is vertically above the channel region.
1. A transistor, comprising:
a polycrystalline silicon semiconductor layer on a substrate, the semiconductor layer having a source region and a channel-and-drain region, the channel-and-drain region having a channel region and a drain region;
a first insulation film on the semiconductor layer;
a gate electrode on the first insulation film on the channel region of the semiconductor layer;
a second insulation film on the gate electrode;
a source electrode and a drain electrode on the second insulation film to project through the first insulation film and the second insulation film so that the source electrode and the drain electrode are coupled to the source region and the drain region respectively, the drain electrode covering at least part of the channel region; and
a contact hole in the second insulation film above the channel region, the contact hole coupling the drain electrode and the gate electrode,
wherein such coupling with the gate electrode is over the channel region.
2. The transistor of claim 1 , wherein lengths and widths of the source region, the channel-and-drain region, or both are longer and wider than respective lengths and widths of the source electrode, the drain electrode, or both.
3. The transistor of claim 1 , wherein lengths and widths of the source region, the drain region, or both are shorter and narrower than respective lengths and widths of the source electrode, the drain electrode, or both.
4. A transistor, comprising:
a polycrystalline silicon semiconductor layer on a substrate, the semiconductor layer having a source region, a channel region and a drain region;
a first insulation film on the semiconductor layer;
a gate electrode on the first insulation film on the channel region of the semiconductor layer;
a second insulation film on the gate electrode;
a source electrode and a drain electrode on the second insulation film to project through the first insulation film and the second insulation film so that the source electrode and the drain electrode are coupled to the source region and the drain region respectively, one of the drain electrode or the source electrode covering at least part of the channel region; and
a contact hole coupling the one of the drain electrode or the source electrode covering the at least part of the channel region and the gate electrode,
wherein such coupling with the gate electrode is over the channel region.
5. The transistor of claim 4 , wherein lengths and widths of the source region, the drain region, or both are longer and wider than respective lengths and widths of the source electrode, the drain electrode, or both.
6. The transistor of claim 4 , wherein lengths and widths of the source region, the drain region, or both are shorter and narrower than respective lengths and widths of the source electrode, the drain electrode, or both.
7. A transistor, comprising:
a polycrystalline silicon semiconductor layer on a substrate, the semiconductor layer having a source-and-channel region and a drain region, the source-and-channel region having a source region and a channel region;
a first insulation film on the semiconductor layer;
a gate electrode on the first insulation film on the channel region of the semiconductor layer;
a second insulation film on the gate electrode;
a source electrode and a drain electrode on the second insulation film to project through the first insulation film and the second insulation film so that the source electrode and the drain electrode are coupled to the source region and the drain region respectively, the source electrode covering at least part of the channel region; and
a contact hole in the second insulation film above the channel region, the contact hole coupling the source electrode and the gate electrode,
wherein such coupling with the gate electrode is over the channel region.
8. The transistor of claim 7 , wherein lengths and widths of the source-and-channel region, the drain region, or both are longer and wider than respective lengths and widths of the source electrode, the drain electrode, or both.
9. The transistor of claim 7 , wherein lengths and widths of the source region, the drain region, or both are shorter and narrower than respective lengths and widths of the source electrode, the drain electrode, or both.
10. The transistor of claim 1 , wherein the substrate is a transparent insulation substrate.
11. The transistor of claim 4 , wherein the substrate is a transparent insulation substrate.
12. The transistor of claim 7 , wherein the substrate is a transparent insulation substrate.