Acoustic wave device and filter
View Patent ↗An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.
1. An acoustic wave device comprising:
a piezoelectric substrate;
a first dielectric film formed on the piezoelectric substrate; and
electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers,
the first dielectric film being cut out between adjacent electrode fingers among the entire electrode fingers,
wherein the first dielectric film comprises an aluminum oxide film, and
wherein a thickness of the first dielectric film is less than 0.02 λ, λ is a period of the electrode fingers, and the second dielectric film comprises a silicon oxide film.
2. The acoustic wave device as claimed in claim 1 , wherein side surfaces of the first dielectric film are flush with those of the electrode fingers.
3. The acoustic wave device as claimed in claim 1 , further comprising a second dielectric film that covers the electrodes, wherein the first dielectric film has a relative dielectric constant greater than that of the second dielectric film.
4. The acoustic wave device as claimed in claim 3 , wherein the second dielectric film has a thickness measured from an upper surface of the first dielectric film, said thickness being greater than that of the electrodes measured from the upper surface of the first dielectric film.
5. The acoustic wave device as claimed in claim 1 , further comprising a third dielectric film provided on the second dielectric film, wherein the third dielectric film has an acoustic velocity greater than that of the second dielectric film.
6. The acoustic wave device as claimed in claim 5 , wherein the third dielectric film comprises an aluminum oxide film.
7. The acoustic wave device as claimed in claim 1 , wherein the piezoelectric substrate comprises one of lithium tantalate and lithium niobate.
8. A filter comprising multiple resonators that include an acoustic wave device comprising:
a piezoelectric substrate;
a first dielectric film formed on the piezoelectric substrate; and
electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers,
the first dielectric film is cut out between adjacent electrode fingers among the entire electrode fingers,
wherein the first dielectric film comprises an aluminum oxide film, and
wherein a thickness of the first dielectric film is less than 0.02 λ, λ is a period of the electrode fingers, and the second dielectric film comprises a silicon oxide film.