Chip-scaled MEMS microphone package
An MEMS microphone package includes a circuit board and an MEMS microphone chip. The MEMS microphone chip, mounted on the circuit board, includes a substrate, an MEMS transducer formed on the substrate, and a readout circuit also formed on the substrate. The MEMS transducer generates a sound signal according to sound pressure variations. The readout circuit reads the sound signal from the MEMS transducer.
1. A micro-electro-mechanical-system microphone chip, comprising:
a substrate;
a micro-electro-mechanical-system transducer formed on the substrate, generating a sound signal according to sound pressure variations; and
a readout circuit also formed on the substrate, reading the sound signal from the micro-electro-mechanical-system transducer, wherein the micro-electro-mechanical-system transducer comprises a flexible diaphragm vibrating according to sound pressure variations and a rigid back plate spaced apart from the flexible diaphragm, wherein the back plate of the micro-electro-mechanical-system transducer is perforated and is grounded.
2. The micro-electro-mechanical-system microphone chip as claimed in claim 1 , wherein the readout circuit is a complementary metal-oxide semiconductor circuit.
3. The micro-electro-mechanical-system microphone chip as claimed in claim 1 , further comprising a plurality of side walls encircling the micro-electro-mechanical-system transducer and the readout circuit on the substrate.
4. The micro-electro-mechanical-system microphone chip as claimed in claim 1 , further comprising a bumping ball formed on the substrate and electrically connected to the readout circuit.
5. The micro-electro-mechanical-system microphone chip as claimed in claim 1 , further comprising a bumping ball formed on the substrate and electrically connected to a constant voltage through the substrate.
6. A microphone package, comprising:
a circuit board; and
a micro-electro-mechanical-system microphone chip, mounted on the circuit board, comprising a substrate, a micro-electro-mechanical-system transducer formed on the substrate, and a readout circuit also formed on the substrate,
wherein the micro-electro-mechanical-system transducer generates a sound signal according to sound pressure variations, and the readout circuit reads the sound signal from the micro-electro-mechanical-system transducer,
wherein the micro-electro-mechanical-system microphone chip further comprises a plurality of side walls, and
wherein the side walls, the circuit board, and the substrate are electrically connected to a constant voltage so as to form a means for shielding, thus protecting the micro-electro-mechanical-system transducer from radio frequency interference.
7. The microphone package as claimed in claim 6 , wherein the micro-electro-mechanical-system transducer comprises a flexible diaphragm vibrating according to sound pressure variations, and a rigid back plate spaced apart from the flexible diaphragm.
8. The microphone package as claimed in claim 7 , wherein the back plate of the micro-electro-mechanical-system transducer is perforated.
9. The microphone package as claimed in claim 6 , wherein the readout circuit is a complementary metal-oxide semiconductor circuit.
10. The microphone package as claimed in claim 6 , wherein the sidewalls encircle the micro-electro-mechanical-system transducer and the readout circuit on the substrate, and separating the circuit board from the substrate.
11. The microphone package as claimed in claim 10 , wherein a back chamber is formed by the side walls, the circuit board, and the substrate, and the circuit board has a through hole connected to an interior of the back chamber.
12. The microphone package as claimed in claim 10 , wherein the substrate has a contact electrically connected to the constant voltage, and the micro-electro-mechanical-system microphone chip further comprises a bumping ball formed on the substrate and electrically connected to the contact as well as the circuit board.
13. The microphone package as claimed in claim 6 , wherein the micro-electro-mechanical-system microphone chip further comprises a bumping ball formed on the substrate and electrically connected between the readout circuit and the circuit board.
14. An electronic device, comprising:
a circuit board;
a system board electrically connected to the circuit board; and
a micro-electro-mechanical-system microphone chip, mounted on the circuit board, comprising a substrate, a micro-electro-mechanical-system transducer formed on the substrate, and a readout circuit also formed on the substrate, wherein the micro-electro-mechanical-system transducer generates a sound signal according to sound pressure variations, and the readout circuit reads the sound signal from the micro-electro-mechanical-system transducer,
wherein the micro-electro-mechanical-system transducer comprises a flexible diaphragm vibrating according to sound pressure variations and a rigid back plate spaced apart from the flexible diaphragm, wherein the rigid back plate is grounded.
15. The electronic device as claimed in claim 14 , wherein the back plate of the micro-electro-mechanical-system transducer is perforated.
16. The electronic device as claimed in claim 14 , wherein the readout circuit is a complementary metal-oxide semiconductor circuit.
17. The electronic device as claimed in claim 14 , wherein the micro-electro-mechanical-system microphone chip further comprises a plurality of side walls encircling the micro-electro-mechanical-system transducer and the readout circuit on the substrate, and separating the circuit board from the substrate.
18. The electronic device as claimed in claim 17 , wherein a back chamber is formed by the side walls, the circuit board, and the substrate, and the circuit board has a through hole connected to an interior of the back chamber.
19. The electronic device as claimed in claim 17 , wherein the side walls, the circuit board, and the substrate are electrically connected to a constant voltage so as to form a means for shielding, thus protecting the micro-electro-mechanical-system transducer from radio frequency interference.
20. The electronic device as claimed in claim 19 , wherein the substrate has a contact electrically connected to the constant voltage, and the micro-electro-mechanical-system microphone chip further comprises a bumping ball formed on the substrate and electrically connected to the contact as well as the circuit board.
21. The electronic device as claimed in claim 14 , wherein the micro-electro-mechanical-system microphone chip further comprises a bumping ball formed on the substrate and electrically connected between the readout circuit and the circuit board.