Dicing tape and die attach adhesive with patterned backing
Provided are a tape, apparatus, and method that relate generally to a single layer adhesive which functions as a dicing tape and also as a die attach adhesive for dicing thinned wafers and subsequent die attach operations of the diced chips in semiconductor device fabrication. The tape, apparatus, and method include a backing with a surface modification that includes a pattern.
1. An article comprising:
a backing comprising a side having a surface modification that includes a pattern;
an adhesive in contact with the pattern;
a semiconductor wafer in contact with the adhesive; and
a dicing frame in contact with the adhesive,
wherein the dicing frame surrounds the wafer and at least a part of the adhesive under the dicing frame is in contact with at least a portion of the pattern,
wherein the pattern comprises a closed loop.
2. The article of claim 1 wherein the closed loop comprises an annulus.
3. A method of dicing semiconductor wafers comprising:
providing an adhesive in contact with a backing that has a surface modification that includes a pattern;
attaching a semiconductor wafer to the adhesive;
attaching a dicing frame to the adhesive so that the dicing frame is in contact with the adhesive and surrounds the wafer,
wherein at least part of the adhesive under the dicing frame is in contact with at least part of the pattern; and
dicing the wafer to form chips,
curing the adhesive,
removing the chips from the backing with the adhesive thereon, and
removing the dicing frame,
wherein the curing the adhesive comprises exposing the adhesive to radiation, and
wherein the adhesive remains on the surface modification of the backing.