Micro-electromechanical nozzle arrangement with an actuating mechanism having a shutter member
Provided is a micro-electromechanical nozzle arrangement for an inkjet printer. The arrangement includes a substrate having a layer of drive circuitry disposed thereon with a passivation layer on top of the drive circuitry layer, the substrate defining an ink inlet channel comprised of a number of discrete openings. The arrangement also includes a roof portion supported on the passivation layer by means of chamber walls to define an ink chamber operatively supplied with ink via the inlet channel, said roof portion defining an ink ejection port. The arrangement further includes an actuating mechanism located inside said chamber, the mechanism including a shutter member displaceable to obstruct fluid flow between the inlet channel and the ejection port or to allow fluid movement between the inlet channel and the ejection port, respectively.
1. A micro-electromechanical nozzle arrangement for an inkjet printer, said arrangement comprising:
a substrate having a layer of drive circuitry disposed thereon with a passivation layer on top of the drive circuitry layer, the substrate defining an ink inlet channel comprised of a number of discrete openings;
a roof portion supported on the passivation layer by means of chamber walls to define an ink chamber operatively supplied with ink via the inlet channel, said roof portion defining an ink ejection port; and
an actuating mechanism located inside said chamber, the mechanism including a shutter member displaceable to obstruct fluid flow between the inlet channel and the ejection port or to allow fluid movement between the inlet channel and the ejection port, respectively.
2. The nozzle arrangement of claim 1 , wherein the actuating mechanism includes a pair of opposed actuators mounted through the passivation layer to be in electrical connection with the drive circuitry layer.
3. The nozzle arrangement of claim 2 , wherein the actuators are positioned on opposite sides of the ink inlet channel leading to the chamber.
4. The nozzle arrangement of claim 3 , wherein the shutter member is mounted between and to the actuators to span the inlet.
5. The nozzle arrangement of claim 2 , wherein the actuators are connected to the drive circuitry layer which, in turn, is connected to a control system so that the actuators can be activated in a substantially synchronous manner.