Liquid crystal display device and a manufacturing method of the same
A four-mask process and a three-mask process proposal are constructed for a TN-type liquid crystal display device and an IPS-type liquid crystal device in which the formation of a passivation insulating layer is not required by streamlining the formation of a scan line and a pseudo-pixel element, both comprising a laminate made of a transparent conductive layer and a metal layer, at the same time and the formation of the transparent conductive pixel electrode by removing the metal layer on the pseudo-pixel electrode at the time of the formation of the opening in the gate insulating layer, by streamlining the treatment of the formation process of the contact and the formation process of the protective insulating layer using one photomask due to the introduction of half-tone exposure technology, and the formation of source-drain wires for etch-stop type insulating gate-type transistor using a photosensitive organic insulating layer and leaving the photosensitive organic insulating layer unchanged on source-drain wires or on the source wire (signal line), or by forming an anodized layer, which is an insulating layer, on source-drain wires.
1. A liquid crystal display device, comprising:
1) a first insulating substrate in which unit pixels are arranged in a 2-dimensional matrix on a principal plane, wherein each of the unit pixels comprises:
a) a bottom gate type insulating gate transistor comprising:
i) a gate electrode;
ii) a source wire;
iii) a drain wire;
iv) a protective insulating layer on a channel of the insulating gate transistor; and
v) a photosensitive organic insulating layer formed on the source wire;
b) a scan line doubling as the gate electrode and a signal line doubling as the source wire of the insulating gate transistor; and
c) a pixel electrode connected to the drain wire;
2) a second insulating substrate facing the first insulating substrate; and
3) a liquid crystal filled between the first insulating substrate and the second insulating substrate;
wherein the scan line comprises a laminate of a transparent conductive layer and a first metal layer and the pixel electrode are formed on the main surface of the first insulating substrate,
wherein an opening that self aligns with the protective insulating layer is defined in the photosensitive organic insulating layer on the pixel electrode and on part of the scan line and the signal line outside an image display area respectively such that the pixel electrode and an electrode terminal of the scan line and the signal line are exposed in the opening, and
wherein the scan line exposed in the opening is a single-layered transparent conductive layer.
2. The liquid crystal display device as in claim 1 , further comprising an anodizable metal layer formed on the source and drain wires of the insulating gate transistor.
3. The liquid crystal display device as in claim 1 , wherein the source wire and the drain wire comprise a laminate of a second semiconductor layer including impurities and one or more second metal layers including a heat-resistant metal layer and are formed on part of the protective insulating layer and on the first semiconductor layer.
4. The liquid crystal display device as in claim 3 , wherein part of the drain wire comprising the second metal layer is formed on part of the pixel electrode in an opening.
5. The liquid crystal display device as in claim 3 , wherein an electrode terminal of the scan line comprising the second metal layer is formed on part of the scan line, and an electrode terminal of the signal line comprising the second metal layer is formed on part of the signal line.
6. The liquid crystal display device as in claim 1 , wherein the source wire comprising a laminate of a second semiconductor layer including impurities and one or more second metal layers including a heat-resistant metal layer is formed on part of the protective insulating layer, on the first semiconductor layer, and on part of an electrode terminal of the signal line, and the drain wire comprising the laminate of the second semiconductor layer including impurities and the one or more second metal layers including the heat-resistant metal layer is formed on part of the protective insulating layer, on the first semiconductor layer, and on part of the pixel electrode in an opening.
7. The liquid crystal display device as in claim 6 , wherein the electrode terminal of the scan line comprising the laminate of the second semiconductor layer and the second metal layer is formed on part of the scan line, and the electrode terminal of the signal line composing part of the signal line is formed on the signal line.
8. A liquid crystal display device, comprising:
1) a first insulating substrate in which unit pixels are arranged in a 2-dimensional matrix on a principal plane, wherein each of the unit pixels comprises:
a) a bottom gate type insulating gate transistor comprising:
i) a gate electrode;
ii) a source wire;
iii) a drain wire;
iv) a protective insulating layer on a channel of the insulating gate transistor; and
v) a photosensitive organic insulating layer formed on the source wire;
b) a scan line doubling as the gate electrode and a signal line doubling as the source wire of the insulating gate transistor;
c) a pixel electrode connected to the drain wire; and
d) a counter electrode formed separated at a prescribed distance from the pixel electrode;
2) a second insulating substrate facing the first insulating substrate; and
3) a liquid crystal filled between the first insulating substrate and the second insulating substrate;
wherein the scan line and counter electrode, comprising a first metal layer of one or more layers, are formed on a main surface of the first insulating substrate,
wherein a first semiconductor layer absent of impurities is formed in an island form through a gate insulating layer of one or more layers above the gate electrode,
wherein the protective insulating layer is formed narrower than the gate electrode on the first semiconductor layer above the gate electrode,
wherein an opening that self aligns with the protective insulating layer is defined on the pixel electrode and on part of the scan line and the signal line outside an image display area respectively such that the pixel electrode and an electrode terminal of the scan line and the signal line are exposed in the opening, and
wherein the scan line exposed in the opening is a single-layered transparent conductive layer.
9. The liquid crystal display device as in claim 8 , wherein the source wire and the drain wire comprising a laminate of a second semiconductor layer including impurities and one or more anodizable metal layers including a heat-resistant metal layer are formed on part of the protective insulating layer and on a first semiconductor layer.
10. The liquid crystal display device as in claim 8 , wherein part of the drain wire comprising an anodizable metal layer is formed on part of the pixel electrode in an opening.
11. The liquid crystal display device as in claim 8 , wherein an electrode terminal of the scan line comprising an anodizable metal layer is formed on part of the scan line, and an electrode terminal of the signal line, which is part of the signal line, is formed on part of a conductive electrode terminal of the signal line.