Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
A semiconductor light-emitting device has a semiconductor layer containing Al between a substrate and an active layer containing nitrogen, wherein Al and oxygen are removed from a growth chamber before growing said active layer and a concentration of oxygen incorporated into said active layer together with Al is set to a level such that said semiconductor light-emitting device can perform a continuous laser oscillation at room temperature.
1. A method of fabricating a surface-emission laser diode, said laser diode comprising: an active region containing at least one active layer for causing optical emission; and upper and lower reflectors vertically sandwiching said active region, said active layer containing Ga, In, nitrogen and As as major components, one of said upper and lower reflectors being a p-type semiconductor reflector, at least said p-type semiconductor reflector comprising a semiconductor distributed Bragg reflector in which there occurs a periodic change of refractive index, said method comprising the steps of:
forming said active layer by an MBE process; and
forming at least said p-type semiconductor reflector by an MOCVD process.
2. A method as claimed in claim 1 , wherein there is provided a step of growing a GaInPAs layer having a composition represented as Ga x In 1-x P y As 1-y (0<x≦1, 0<y≦1) in a growth chamber in which said active layer is formed, before said step of forming said active layer.
3. A method as claimed 1 , wherein there is provided a step of interrupting a growth while growing a distributed Bragg reflector constituting any of said upper and lower reflectors.
4. A method of fabricating a surface-emission laser diode comprising: an active region containing at least one active layer for causing optical emission; and upper and lower reflectors vertically sandwiching said active region, said active layer containing Ga, In, nitrogen and As as major components, at least said lower reflector comprising a semiconductor distributed Bragg reflector in which there occurs a periodic change of refractive index, said method comprising the steps of:
forming said lower reflector in any of a first MOCVD growth chamber and an MBE growth chamber; and
forming said active layer in a second MOCVD growth chamber.
5. A fabrication process as claimed in claim 4 , wherein said second MOCVD growth chamber is not used for growing a material layer containing Al.
6. A fabrication process as claimed in claim 4 , wherein said second MOCVD growth chamber is used also for growing a material containing Al, said step of forming said active layer being conducted after a step of removing residual Al species comprising one or more of a residual Al source material, a residual Al reactant, a residual Al compound, and residual Al remaining in said second MOCVD growth chamber after a growth of said material.
7. A method as claimed in claim 4 , wherein there is provided a step of growing a GaInPAs layer having a composition represented as Ga x In 1-x P y As 1-y (0≦x≦1, 0≦y≦1) in said second MOCVD growth chamber before growing said active layer.
8. A method as claimed in claim 4 , wherein there is conducted an interruption of growth while growing said semiconductor Bragg reflector.
9. A method of fabricating a surface-emission laser diode, said surface-emission laser diode comprising: an active region containing at least one active layer for causing optical emission; and upper and lower reflectors vertically sandwiching said active region, said active layer containing Ga, In, nitrogen and As as major components, at least one of said upper and lower reflectors including a semiconductor distributed Bragg reflector in which there occurs a periodic change of refractive index, said method comprising the steps of:
forming said semiconductor distributed Bragg reflector in a first MOCVD growth chamber; and
forming said active region in a second MOCVD growth chamber.
10. A fabrication process as claimed in claim 9 , wherein said second MOCVD growth chamber is not used for growing a material layer containing Al.
11. A fabrication process as claimed in claim 9 , wherein said second MOCVD growth chamber is used also for growing a material containing Al, said step of forming said active layer being conducted after a step of removing residual Al species comprising one or more of a residual Al source material, a residual Al reactant, a residual Al compound, and residual Al remaining in said second MOCVD growth chamber after a growth of said material.
12. A method as claimed in claim 9 , wherein there is provided a step of growing a GaInPAs layer having a composition represented as Ga x In 1-x P y As 1-y (0<x≦1, 0<y≦1) in said second MOCVD growth chamber before growing said active layer.
13. A method as claimed in claim 9 , wherein there is conducted an interruption of growth while growing said semiconductor Bragg reflector.
14. A method of fabricating a surface-emission laser diode, said laser diode comprising: an active region containing at least one active layer for causing optical emission; and upper and lower reflectors vertically sandwiching said active region, said active layer containing Ga, In, nitrogen and As as major components, one of said upper and lower reflectors being a p-type semiconductor reflector, at least said p-type semiconductor reflector including a semiconductor distributed Bragg reflector in which there occurs a periodic change of refractive index, said method comprising the steps of:
forming said active layer in a first growth chamber, said first growth chamber being an MBE chamber;
transporting a substrate of said surface-emission laser diode, after said step of forming said active layer, from said first growth chamber to a second growth chamber via a vacuum transportation path connecting said first and second growth chambers, said second growth chamber being an MOCVD chamber; and
forming at least said p-type semiconductor reflector in said second growth chamber.
15. A method of fabricating a surface-emission laser diode comprising: an active region containing at least one active layer for causing optical emission; and
upper and lower reflectors vertically sandwiching-said active region, said active layer containing Ga, In, nitrogen and As as major components, at least said lower reflector including a semiconductor distributed Bragg reflector in which there occurs a periodic change of refractive index, said method comprising the steps of:
forming said lower reflector in a first MOCVD growth chamber;
transporting a substrate of said surface-emission laser diode from said first growth chamber, after said step of forming said lower reflector, to a second growth chamber via a vacuum transportation path connecting said first and second growth chambers, said second growth chamber being an MBE chamber; and
forming said active layer in said second growth chamber.