Device comprising electrode pad
View Patent ↗A pad structure 100 includes an electrode pad (a first electrically conducting film 104 and a second electrically conducting film 110 ) and an insulating film provided over a peripheral region of the electrode pad so as to surround the electrode pad, and the insulating film has a structure including a protective film (a cover oxide film 106 ) and a transparent resin film (a transparent resin 108 ) provided on the cover oxide film 106.
1. A semiconductor device, comprising:
a peripheral portion and an interior portion inside said peripheral portion;
an interlayer film ( 105 );
an electrode pad having an exposed metal wire-contact layer ( 110 ) on the interlayer film;
a first insulating film ( 106 ) covering the interior portion of the device and surrounding edge portions of the metal wire-contact layer at positions along said peripheral portion of the device, the first insulating film having a plurality of first openings, each exposing a respective first part of the metal wire-contact layer surrounded by the first insulating film; and
a second insulating film ( 108 c ) covering the first insulating film in the interior portion, the second insulating film having a plurality of second openings, each exposing a respective one of the plurality of first openings and the exposed first part of the metal wire-contact layer,
wherein each of the plurality of second openings open toward the peripheral portion of the device and are coupled to each other at the peripheral portion.
2. The semiconductor device of claim 1 , wherein said first and second openings are rectangular.
3. The semiconductor device of claim 1 , wherein said second insulating film is a resin film.
4. The semiconductor device of claim 1 , wherein said first insulating film is a cover oxide and said second insulating film is a transparent resin film.
5. The semiconductor device of claim 1 , wherein the first part of said metal wire-contact layer exposed by said first openings is a concavity, and said metal wire-contact layer further includes a second part that contacts the first part beneath the concavity, said interlayer film being between said first and second parts outside the concavity.
6. The semiconductor device of claim 1 , further comprising a plurality of electrode pads that each includes an exposed part of said metal wire-contact layer adjacent to said peripheral portion of the device.
7. The semiconductor device of claim 1 , wherein the device is a solid-state image sensing device.
8. The semiconductor device of claim 1 , wherein each of the plurality of second openings are concave to receive corresponding ones of the plurality of first openings.
9. The semiconductor device of claim 8 , wherein each of the pluralities of first and second openings alternate along the peripheral portion of the device.
10. The semiconductor device of claim 9 , wherein width portions of the second insulating film provided between the plurality of first openings are different.
11. The semiconductor device of claim 1 , wherein said second insulating film extends only partially around said plurality of first openings.