Flat panel display with high efficiency and method of fabricating the same
An organic light emitting device is disclosed. In one embodiment, the organic light emitting device includes red (R), green (G) and blue (B) lower electrodes formed on a substrate. R, G, B organic thin film layers are formed on the R, G, B lower electrodes, respectively. Additionally, an upper single or multilayer electrode is formed over the substrate. Portions of the upper electrode that correspond to the R, G, B organic thin film layers, respectively, are formed to each have a different thickness. Various methods for forming the upper electrode using a fine metal mask, a halftone mask, and single and multiple photolithography processes are also disclosed.
1. A method of forming an organic light emitting device having R, G, B unit pixels, in which the R, G, B unit pixels comprise R, G, B lower electrodes formed on a substrate, R, G, B organic thin film layers each formed on the R, G, B lower electrodes, and an upper electrode formed over the substrate, the method comprising the steps of:
forming the upper electrode, the upper electrode being formed by:
forming a first upper electrode material on the substrate; and
forming a second upper electrode material on the first upper electrode material, the second upper electrode material having portions, each portion having a different thickness that corresponds to one of the R, G, B unit pixels,
wherein forming the second upper electrode material includes:
forming on portions of the first upper electrode material that corresponds to the R, G, B organic thin film layers, one or more first layers, each of the first layers having a different thickness that corresponds to one of the R, G, B unit pixels, respectively; and
forming a second layer in a uniform thickness on the first layer and the first upper is electrode material.
2. The method of claim 1 , wherein the first layers for the R, G, and B unit pixels of the second upper electrode material are deposited using a fine metal mask so that each of the R, G, and B unit pixels has the different thickness.
3. The method of claim 1 , wherein the first layers for the R, G, and B unit pixels of the second upper electrode material are patterned by three-time repetition of a photolithography so that each of the R, G, and B unit pixels has the different thickness.
4. The method of claim 1 , wherein the first layers for the R, G, and B unit pixels of the second upper electrode material are patterned by a single photolithography process using a halftone mask so that each of the R, G, and B unit pixels has the different thickness.
5. The method of claim 1 , wherein an emitting light is emitted in direction of the upper electrode.
6. A method of forming an organic light emitting device with R, G, B unit pixels, in which the R, G, B unit pixels comprise R, G, B lower electrodes formed on a substrate, R, G, B organic thin film layers each formed in the R, G, B lower electrodes, and an upper electrode formed over the substrate, the method comprising the steps of:
forming the upper electrode, the upper electrode being formed by:
forming a first upper electrode material on the substrate; and
forming a second upper electrode material on the first upper electrode material, the second upper electrode material having portions, each portion having a different thickness that corresponds to one of the R, G, B unit pixels,
wherein forming the second upper electrode material includes:
forming in a uniform thickness on the first upper electrode material a first layer; and
forming second layers for the R, G, B unit pixels on portions of the first layer that correspond to the R, G, B organic thin film layers, one or more second layers, so that each of the R, G, and B unit pixels has the different thickness.
7. The method of claim 6 , wherein the second layers for the R, G, and B unit pixels of the second upper electrode material are deposited using a fine metal mask so that each of the R, G, and B unit pixels has the same thickness.
8. The method of claim 6 , wherein the second layers for the R, G, and B unit pixels of the second upper electrode material are patterned by three-time repetition of a photolithography process so that each of the R, G, and B unit pixels has the different thickness.
9. The method of claim 6 , wherein the second layers for the R, G, and B unit pixels of the second upper electrode material are patterned by a single photolithography process using a halftone mask so that each of the R, G, and B unit pixels has the different thickness.
10. The method of claim 6 , wherein an emitting light is emitted in direction of the upper electrode.