Semiconductor storage device
It is intended to provide a semiconductor device having a reduced thickness of a silicon nitride film on an outer periphery of a gate electrode of an SGT. A semiconductor device of the present invention is constructed using a MOS transistor which has a structure where a drain, a gate and a source are arranged in a vertical direction with respect to a substrate, and the gate is formed to surround a pillar-shaped semiconductor layer. The semiconductor device comprises: a silicide layer formed in an upper surface of each of upper and lower diffusion layers formed in upper and underneath portions of the pillar-shaped semiconductor layer, in a self-alignment manner, wherein the silicide layer is formed after forming a first dielectric film on a sidewall of the pillar-shaped semiconductor layer to protect the sidewall of the pillar-shaped semiconductor layer during formation of the silicide layer; and a second dielectric film formed, after forming the silicide layer and then removing the first dielectric film, in such a manner as to cover a source/drain region formed in the underneath portion of the pillar-shaped semiconductor layer, the gate electrode formed on the sidewall of the pillar-shaped semiconductor layer, and a source/drain region formed on the upper portion of the pillar-shaped semiconductor layer.
1. A method of producing a semiconductor device constructed using a MOS transistor which has a structure where a source region and a drain region are formed, respectively, in one and a remaining one of an upper portion and an underneath portion of a pillar-shaped semiconductor layer formed on a silicon substrate, and a gate electrode is formed to surround the pillar-shaped semiconductor layer, the method being characterized by comprising the steps of:
etching a silicon substrate to form a pillar-shaped semiconductor layer;
forming a gate dielectric film at least on a surface of a sidewall of the pillar-shaped semiconductor layer;
forming a gate conductive film on a surface of the gate dielectric film;
etching each of the gate dielectric film and the gate conductive film to form a gate electrode;
forming a first dielectric film on the sidewall of the upper portion of the pillar-shaped semiconductor layer to prevent siliciding the sidewall of the upper portion of the pillar-shaped semiconductor layer when a silicide layer is formed on an exposed portion of each of the source and drain regions formed in the upper and underneath portions of the pillar-shaped semiconductor layer;
forming a silicide layer on the exposed portion of each of the diffusion layers formed in the upper and underneath portions of the pillar-shaped semiconductor layer;
after completion of the formation of the silicide layer, removing the first dielectric film;
forming a second dielectric film on the pillar-shaped semiconductor layer and the gate electrode to serve as a contact stopper; and
forming a third dielectric film on the second dielectric film to serve as an interlayer film.
2. The method as defined in claim 1 , wherein the first dielectric film comprises any one of a silicon oxide film, a silicon nitride film or a stacked layer consisting of the silicon oxide film and the silicon nitride film.
3. The method as defined in claim 1 , wherein the second dielectric film comprises a silicon nitride film and the third dielectric film comprises a silicon oxide film.
4. The method as defined in claim 2 , wherein the second dielectric film comprises a silicon nitride film and the third dielectric film comprises a silicon oxide film.