Piezoelectric actuator and electronic apparatus
Piezoelectric actuator ( 51 ) includes a piezoelectric element ( 11 ) that performs expansion/contraction movement in accordance with the state of an electrical field, a base ( 21 ) with the piezoelectric element ( 11 ) adhered to one surface thereof, and a support member ( 46 ) for supporting the piezoelectric element ( 11 ) and the base ( 21 ), the piezoelectric element ( 11 ) and base ( 21 ) vibrating up and down in accordance with the expansion/contraction movement of the piezoelectric element ( 11 ). The base ( 21 ) is connected to the support member ( 46 ) by way of a vibration film ( 31 ) having less rigidity than the base ( 21 ). In addition, the piezoelectric element ( 11 ) and support member ( 46 ) have different outline shapes.
1. A piezoelectric actuator comprising:
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein, when a 1 is the length in the minor-axis direction and b 1 is the length in the major-axis direction in the outline shape of said piezoelectric element, a 1 /b 1 is in the range from 0.6 to 1.
2. A piezoelectric actuator comprising:
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein, when a 2 is the length of the short sides and b 2 is the length of the long sides of the inside dimensions of said support member, a 2 /b 2 is within the range from 0.5 to 1.0.
3. A piezoelectric actuator comprising:
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein, on the outer circumference of said base, a plurality of beams are formed, said beams extending toward the outside within a plane that is parallel to the surface on which said piezoelectric element is adhered to said base.
4. The piezoelectric actuator according to claim 3 , wherein said plurality of beams are arranged with equal spacing between said beams.
5. A piezoelectric actuator comprising;
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein a curved portion, in which said vibration film is curved three-dimensionally in the direction of thickness, is formed around the circumference of the area of said vibration film in which said base is arranged.
6. A piezoelectric actuator comprising:
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein the piezoelectric actuator further comprises a piezoelectric element separate from said piezoelectric element that forms a bimorph element.
7. A piezoelectric actuator comprising:
a piezoelectric element that performs an expansion and contraction movement in accordance with the state of an electrical field,
a base having said piezoelectric element adhered to at least one surface thereof, and
a support member that supports said piezoelectric element and said base;
wherein said base is connected to said support member by way of a vibration film, the outline shapes of said piezoelectric element and said support member differ from each other in that said piezoelectric element has a different size than said support member and that said piezoelectric element has a different shape than said support member, and said piezoelectric element and said base vibrate in the direction of thickness of said piezoelectric element in accordance with said movement of said piezoelectric element,
wherein said piezoelectric element has a laminated construction in which layers of piezoelectric material and electrode layers are stacked alternately.