X-ray tube target, X-ray tube using the same, X-ray inspection device and method of producing X-ray tube target
View Patent ↗According to one embodiment, there is provided an X-ray tube target. The X-ray tube target has a structure in which a carbon base material is bonded with an Mo base material or Mo alloy base material with a joint layer. The joint layer includes an MoNbTi diffusion phase, an NbTi alloy phase, an Nb-rich phase and a ZrNb alloy phase when the ratios of components in the joint layer are detected by EPMA.
1. An X-ray tube target having a structure in which a carbon base material is bonded with an Mo base material or Mo alloy base material with a joint layer disposed therebetween, wherein the joint layer comprises an MoNbTi diffusion phase, an NbTi alloy phase, an Nb-rich phase and a ZrNb alloy phase when the ratios of components in the joint layer are detected by EPMA.
2. The X-ray tube target according to claim 1 , wherein the MoNbTi diffusion phase comprises an MoNbTi solid solution.
3. The X-ray tube target according to claim 1 , wherein the NbTi alloy phase comprises 10% by mass (including 0) or less of Mo.
4. The X-ray tube target according to claim 1 , wherein the Nb-rich phase comprises 90% by mass or more of Nb.
5. The X-ray tube target according to claim 1 , wherein the joint layer comprises a ZrC phase dispersed in the ZrNb alloy phase.
6. The X-ray tube target according to claim 1 , wherein a thickness of the joint layer falls within a range of 20 to 2000 μm.
7. The X-ray tube target according to claim 6 , wherein a thickness of the MoNbTi diffusion phase falls within a range of 1 to 100 μm, a thickness of the NbTi alloy phase falls within a range of 10 to 500 μm, a thickness of the Nb-rich phase falls within a range of 1 to 600 μm, and a rest of a thickness of the joint layer is the thickness of the ZrNb alloy phase.
8. The X-ray tube target according to claim 1 , wherein a concave part is formed on the carbon base material at a contact plane between the carbon base material and the joint layer.
9. An X-ray tube comprising the X-ray tube target according to claim 1 .
10. The X-ray tube according to claim 9 , wherein the X-ray tube target is a rotating anode.
11. An X-ray inspection device comprising the X-ray tube according to claim 9 .
12. The X-ray inspection device according to claim 11 , the inspection device is used for CTs or fluoroscopes.
13. A method of producing an X-ray tube target having a structure in which a carbon base material is bonded with an Mo base material or Mo alloy base material with a joint layer disposed therebetween, the method comprising;
producing a first solder layer comprising an NbTi alloy, a second solder layer comprising Nb or an Nb alloy and a third solder layer comprising Zr between the carbon base material and the Mo base material or Mo alloy base material; and
bonding these materials at a temperature falling within a range of 1730 to 1900° C.
14. The method of producing an X-ray tube target according to claim 13 , wherein the boding is carried out at a temperature falling within a range of 1730 to 1860° C.
15. The method of producing an X-ray tube target according to claim 13 , wherein the boding is carried out with applying a pressure falling within a range of 1 to 200 kPa.
16. The method of producing an X-ray tube target according to claim 13 , wherein the boding is carried out under vacuum or in an inert gas atmosphere.
17. The method of producing an X-ray tube target according to claim 13 , wherein the first solder layer, the second solder layer and the third solder layer are each a foil.