Fabrication method of light emitting device
Provided is a method for fabricating a light emitting device. The method for fabricating the light emitting device includes forming a buffer layer including a compound semiconductor in which a rare-earth element is doped on a substrate, forming a light emitting structure including a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer, which are successively stacked on the buffer layer, forming a first electrode layer on the light emitting structure, removing the substrate, and forming a second electrode layer under the light emitting structure.
1. A method for fabricating a light emitting device, the method comprising:
forming a buffer layer comprising a compound semiconductor in which a rare-earth element is doped on a substrate;
forming a light emitting structure comprising a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer, which are successively stacked on the buffer layer;
forming a first electrode layer on the light emitting structure;
removing the substrate; and
forming a second electrode layer under the light emitting structure.
2. The method of claim 1 , wherein the buffer layer has band gap energy less than that of the light emitting structure.
3. The method of claim 1 , wherein the buffer layer has band gap energy of about 1.8 eV to about 2.3 eV.
4. The method of claim 1 , wherein the rare-earth element comprises at least one of Eu, Er, Pr, Tb, Dy, Ce, Sm, Gd, Ho, Yb, Lu, Nd, Pm, and Tm.
5. The method of claim 1 , wherein Eu is doped into a GaN-based compound semiconductor to form the buffer layer.
6. The method of claim 1 , wherein the buffer layer and the light emitting structure are formed of the same compound semiconductor material.
7. The method of claim 1 , wherein the buffer layer has a thickness of about 0.1 nm to about 1 μm.
8. The method of claim 1 , wherein the removing of the substrate comprises irradiating a laser onto a bottom surface of the substrate to dissolve the buffer layer, thereby removing the substrate.
9. The method of claim 8 , wherein the laser has a wavelength of at least about 320 nm.
10. The method of claim 1 , wherein the forming of the first electrode layer comprises:
forming an ohmic layer on the light emitting structure;
forming a reflective layer on the ohmic layer; and
forming a conductive support member on the reflective layer.
11. The method of claim 1 , further comprising, after the removing of the substrate, removing the buffer remaining on a bottom surface of the light emitting structure.