MEMS tunable silicon fabry-perot cavity and applications thereof
View Patent ↗A method for fabricating a tunable Fabry-Perot cavity comprises etching a substrate to form two reflectors separated by an air gap and an electrostatic mechanism. One of the two reflectors is mobile and connected to the electrostatic mechanism. Therefore, operation of the electrostatic mechanism moves the mobile reflector to change the thickness of the air gap and thereby tune the Fabry-Perot cavity. A tunable Fabry-Perot cavity fabricated with the above method comprises: a substrate; two reflectors formed in the substrate and separated by an air gap having a thickness, wherein one of the two reflectors is mobile; and an electrostatic mechanism formed in the substrate and connected to the mobile reflector. The mobile reflector connected to the electrostatic mechanism is moved upon operation of the electrostatic mechanism to change the thickness of the air gap and thereby tune the Fabry-Perot cavity. Applications of the Fabry-Perot cavity may comprise a tunable doped fiber laser, a tunable dispersion compensator and an integrated microfluidic refractometer.
1. An integrated microfluidic refractometer for measuring a refractive index of a fluid, the refractometer comprising:
a Fabry-Perot cavity having layers of silicon vertically through a plane of a substrate, the Fabry-Perot cavity comprising two reflectors each comprising three layers of silicon, wherein, in each reflector, a first layer of air is disposed between a first and a second of the layers of silicon and a second layer of air is disposed between the second and a third of the layers of silicon; and
a microfluidic channel, horizontally formed in the plane of the substrate and connected to the Fabry-Perot cavity, for carrying the fluid to the Fabry-Perot cavity, wherein the microfluidic channel and the Fabry-Perot cavity are coplanar within the substrate;
wherein the Fabry-Perot cavity detects a shift of wavelength corresponding to a variation of the refractive index when the fluid passes through the Fabry-Perot cavity.
2. An integrated microfluidic refractometer as defined in claim 1 , further comprising a reservoir for containing the fluid to be measured.
3. An integrated microfluidic refractometer as defined in claim 1 , wherein the microfluidic channel uses a capillary effect to carry the fluid to the tunable Fabry-Perot cavity.
4. An integrated microfluidic refractometer as defined in claim 1 , wherein the refractometer is fabricated through a single photolithography and etching process.
5. An integrated microfluidic refractometer as defined in claim 4 , wherein the etching process comprises an optimized bosch processs.