Apparatus for multiple frequency power application
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
1. A power matching apparatus, comprising:
a first RF power input coupled to a first adjustable capacitor;
a second RF power input coupled to a second adjustable capacitor;
a power junction coupled to the first adjustable capacitor and the second adjustable capacitor;
a receiver circuit coupled to the power junction;
a high voltage filter coupled to the power junction, the high voltage filter having a high voltage output; and
an RF power output coupled to the high voltage filter.
2. The power matching apparatus of claim 1 , wherein the RF power output further comprises a high voltage output from a high voltage filter board coupled to the power junction.
3. The power matching apparatus of claim 1 , wherein the first RF power input is coupled to a first RF generator providing a first power signal at a first frequency and the second RF power input is coupled to a second RF generator providing a second power signal at a second frequency less than the first frequency.
4. The power matching apparatus of claim 1 , wherein the first adjustable capacitor is adjustable via a line comprising an alternating series of grounded inductors and capacitors.
5. The power matching apparatus of claim 1 , wherein the first RF power input is coupled to a first RF generator providing a first power signal at a first frequency between 12.88 MHz and 14.23 MHz at an RF power level of up to 5 KW and the second RF power input is coupled to a second RF generator providing a second power signal at a second frequency between 1.8 MHz and 2.17 MHz at an RF power level of up to 7.5 kW.
6. The power matching apparatus of claim 5 , wherein the receiver circuit is adapted to receive a signal of at least a third frequency.
7. The power matching apparatus of claim 6 , wherein the receiver circuit comprises a serially connected third capacitor and an inductor in parallel with a resistor.
8. The power matching apparatus of claim 6 , wherein the at least third frequency is a 162 MHz frequency, a 60 MHz frequency, or a combination thereof.
9. The power matching apparatus of claim 1 , wherein the RF power output is coupled to the power junction.
10. The power matching apparatus of claim 9 , wherein the RF power output comprises a multi-contact B 20 N.
11. The power matching apparatus of claim 9 , further comprising:
a voltage/current detector coupled to the power junction and the RF power output.
12. The power matching apparatus of claim 11 further comprising:
an analog board coupled to the voltage/current detector, wherein the analog board is adapted to receive separate voltage and current signals from the voltage/current detector.
13. The power matching apparatus of claim 12 , further comprising:
a motor driven board coupled to the first adjustable capacitor and the second adjustable capacitor.
14. The power matching apparatus of claim 13 , further comprising:
a digital board coupled to the analog board;
an interface board coupled to the digital board and the motor driven board, wherein the interface board is adapted to receive and perform a function based on a control signal from the digital board.
15. The power matching apparatus of claim 14 , further comprising:
a first motor sensor coupled to the first adjustable capacitor and a second motor sensor connected to the second adjustable capacitor.
16. A power matching apparatus, comprising:
a first RF power input coupled to a first adjustable capacitor;
a second RF power input coupled to a second adjustable capacitor;
a power junction coupled to the first adjustable capacitor and the second adjustable capacitor;
a receiver circuit coupled to the power junction;
a high voltage filter coupled to the power junction, the high voltage filter having a high voltage output;
a voltage/current detector coupled to the power junction;
an RF power output coupled to the voltage/current detector;
a motor driven board coupled to the first adjustable capacitor and the second adjustable capacitor;
an analog board coupled to the voltage/current detector, wherein the analog board is adapted to receive separate voltage and current signals from the voltage/current detector;
a digital board coupled to the analog board;
an interface board coupled to the digital board and the motor driven board, wherein the interface board is adapted to receive and perform a function based on a control signal from the digital board; and
a first motor sensor coupled to the first adjustable capacitor and a second motor sensor connected to the second adjustable capacitor.
17. The power matching apparatus of claim 16 , wherein the RF power output further comprises a high voltage output from the high voltage filter coupled to the power junction.
18. The power matching apparatus of claim 16 , wherein the receiver circuit comprises a serially connected third capacitor and an inductor in parallel with a resistor.
19. The power matching apparatus of claim 16 , wherein the first adjustable capacitor is adjustable via a line comprising an alternating series of grounded inductors and capacitors.
20. The power matching apparatus of claim 16 , wherein the RF power output comprises a multi-contact B 20 N.