Vitreous silica crucible manufacturing apparatus
A vitreous silica crucible manufacturing apparatus includes a plurality of carbon electrodes configured to heat and melt raw material powder by arc discharge, and a value of a ratio R 2 /R 1 of a diameter R 2 of a front end of each of the carbon electrodes to a diameter R 1 of a base end is set in a range of 0.6 to 0.8. Each carbon electrode has a diameter reduction portion formed at a front end position and reduced in diameter from a diameter R 3 of a base end side to the diameter R 2 of the front end. When a length of the diameter reduction portion is L 1 , the diameter of the front end is R 2 , the diameter of the base end is R 1 , an angle between the axis lines of the carbon electrodes is θ 1 , and X=(R 1 −R 2 )/2, a value of L 1 −(X/tan(θ 1 /2)) is set in a range of 50 to 150 mm.
1. A vitreous silica crucible manufacturing apparatus, comprising:
a plurality of carbon electrodes configured to heat and melt raw material powder by arc discharge, wherein
a value of a ratio R 2 /R 1 of a diameter R 2 of a front end of each of the carbon electrodes to a diameter R 1 of a base end thereof is set in a range of 0.6 to 0.8,
a flat surface which is approximately perpendicular to an axis line is formed on the front end of each of the carbon electrodes,
each of the carbon electrodes have a diameter reduction portion formed at a front end position and reduced in diameter from a diameter R 3 of a base end side to the diameter R 2 of the front end, and
a length L 1 of the diameter reduction portion, the diameter R 2 of the front end, and the diameter R 1 of the base end are set such that a value of L 1 −(X/tan(θ 1 /2)) is set in a range of 50 to 150 mm when an angle between the axis lines of the carbon electrodes is θ 1 and X=(R 1 −R 2 )/2.
2. The vitreous silica crucible manufacturing apparatus as claimed in claim 1 , wherein
a value of a ratio R 3 /R 1 of the diameter R 3 of the base end side of the diameter reduction portion to the diameter R 1 of the base end of each of the carbon electrodes is set in a range of 0.8 to 1.
3. The vitreous silica crucible manufacturing apparatus as claimed in claim 1 , wherein
an angle α between a lateral periphery surface of the diameter reduction portion and the flat surface, the length L 1 of the diameter reduction portion, the diameter R 2 of the front end, and the diameter R 1 of the base end are set to satisfy a relationship of tan(90°−α)=X/(L 1 −50) to X/(L 1 −150) when X=(R 1 −R 2 )/2.
4. The vitreous silica crucible manufacturing apparatus as claimed in claim 3 ,
wherein
a half of the angle θ 1 between the axis lines of the carbon electrodes is in a range of 5° to 20°, and the angle α between the lateral periphery surface of the diameter reduction portion and the flat surface is set to satisfy a relationship of θ 1 >2×(90−α).
5. The vitreous silica crucible manufacturing apparatus as claimed in claim 1 , further comprising:
a mold configured to define an outer shape of the vitreous silica crucible; and
an electrode position setter configured to set positions of the carbon electrodes, wherein
the carbon electrodes are positioned above the mold.
6. The vitreous silica crucible manufacturing apparatus as claimed in claim 5 , wherein
the carbon electrodes include a first carbon electrode and a second carbon electrode connected to a base end of the first carbon electrode.
7. The vitreous silica crucible manufacturing apparatus as claimed in claim 5 , wherein
the electrode position setter has support portions configured to support the carbon electrodes such that a distance between the electrodes is able to be set.
8. The vitreous silica crucible manufacturing apparatus as claimed in claim 7 , wherein
the support portions include an angle setting shaft configured to rotatably support the carbon electrodes and rotary actuators configured to control rotation angles of the carbon electrodes.
9. The vitreous silica crucible manufacturing apparatus as claimed in claim 7 , wherein
the electrode position setter further includes a horizontal mover configured to move the support portions in a horizontal direction and a vertical mover configured to integrally move the plurality of support portions and the horizontal mover in a vertical direction.
10. The vitreous silica crucible manufacturing apparatus as claimed in claim 1 , wherein
the plurality of carbon electrodes include three carbon electrodes disposed in a reverse triangular pyramid shape, an apex of which is located on a lower side.
11. The vitreous silica crucible manufacturing apparatus as claimed in claim 10 , wherein
a half of the angle θ 1 between the axis lines of the carbon electrodes is set in a range of 5° to 20°.
12. The vitreous silica crucible manufacturing apparatus as claimed in claim 10 , wherein
an angle α between the lateral periphery surface of the diameter reduction portion and the flat surface is set to satisfy a relationship of θ 1 >2×(90−α).
13. The vitreous silica crucible manufacturing apparatus as claimed in claim 10 , wherein
each of the carbon electrodes is formed such that one carbon electrode comes in contact with another carbon electrode only at one place.
14. The vitreous silica crucible manufacturing apparatus as claimed in claim 10 , wherein
the plurality of carbon electrodes is formed such that only one place of one carbon electrode is nearest to another carbon electrode.