Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography
View Patent ↗The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography techniques.
1. A method for forming a plurality of substantially uniform nanoparticles, the method comprising:
(a) providing a patterned template and a first substrate, wherein at least one of said patterned template or said substrate has a non-wetting surface, and wherein the patterned template comprises a patterned template surface having a plurality of recessed areas formed therein;
(b) disposing a volume of liquid material in or on at least one of:
(i) the patterned template surface;
(ii) the plurality of recessed areas; and
(iii) said first substrate; and
(c) forming said plurality of substantially uniform nanoparticles by:
contacting the patterned template surface with the first substrate and treating the liquid material to form nanoparticles in the recessed areas of the patterned template wherein the nanoparticles are essentially free of a scum layer;
(d) removing the first substrate from the patterned template; and
(e) releasing the nanoparticles from the patterned template by applying the patterned template to a second substrate, wherein the second substrate has an affinity for the nanoparticles that is greater than the affinity of the nanoparticles for the patterned template, and wherein each of said nanoparticles substantially mimics the recessed areas.
2. The method of claim 1 , wherein the patterned template comprises a solvent resistant, low surface energy polymeric material.
3. The method of claim 1 , wherein the patterned template comprises a solvent resistant elastomeric material.
4. The method of claim 1 , wherein at least one of the patterned template and first substrate comprises a material selected from the group consisting of a perfluoropolyether material, a fluoroolefin material, an acrylate material, a silicone material, a styrenic material, a fluorinated thermoplastic elastomer (TPE), a triazine fluoropolymer, a perfluorocyclobutyl material, a fluorinated epoxy resin, and a fluorinated monomer or fluorinated oligomer that can be polymerized or crosslinked by a metathesis polymerization reaction.
5. The method of claim 1 , wherein at least one of the patterned template and the first substrate has a surface energy lower than 18 mN/m.
6. The method of claim 1 , wherein at least one of the patterned template and the first substrate has a surface energy lower than 15 mN/m.
7. The method of claim 1 , wherein the first substrate is selected from the group consisting of a polymer material, an inorganic material, a silicon material, a quartz material, a glass material, and surface treated variants thereof.
8. The method of claim 1 , wherein the first substrate comprises a patterned area.
9. The method of claim 1 , wherein the plurality of recessed areas comprise a plurality of cavities.
10. The method of claim 9 , wherein the plurality of cavities comprise a plurality of structural features.
11. The method of claim 10 , wherein the plurality of structural features have a dimension ranging from about 1,000 nm to about 100 nm in size.
12. The method of claim 10 , wherein the plurality of structural features have a dimension ranging from about 100 nm to about 1 nm in size.
13. The method of claim 1 , wherein the patterned template comprises a patterned template formed by a replica molding process.
14. The method of claim 13 , wherein the replica molding process comprises:
(a) providing a master template;
(b) contacting a liquid material with the master template; and
(c) curing the liquid material to form a patterned template.
15. The method of claim 14 , wherein the master template is selected from the group consisting of:
(a) a template formed from a lithography process;
(b) a naturally occurring template; and
(c) combinations thereof.
16. The method of claim 1 , comprising modifying the patterned template surface by a surface modification step.
17. The method of claim 16 , wherein the surface modification step is selected from the group consisting of a plasma treatment, a chemical treatment, and an adsorption process.
18. The method of claim 1 , comprising positioning the patterned template and the first substrate in a spaced relationship to each other such that the patterned template surface and the first substrate face each other in a predetermined alignment.
19. The method of claim 1 , wherein the liquid material is selected from the group consisting of a polymer, a solution, a monomer, a plurality of monomers, a polymerization initiator, a polymerization catalyst, an inorganic precursor, a metal precursor, a pharmaceutical agent, a tag, a magnetic material, a paramagnetic material, a superparamagnetic material, a ligand, a cell penetrating peptide, a porogen, a surfactant, a plurality of immiscible liquids, a solvent, and a charged species.
20. The method of claim 19 , wherein the pharmaceutical agent is selected from the group consisting of a drug, a peptide, RNAi, and DNA.
21. The method of claim 19 , wherein the tag is selected from the group consisting of a fluorescence tag, a radiolabeled tag, and a contrast agent.
22. The method of claim 19 , wherein the ligand comprises a cell targeting peptide.
23. The method of claim 1 , wherein the liquid material comprises a non-wetting agent.
24. The method of claim 1 , wherein the disposing of the volume of liquid material is regulated by a spreading process.
25. The method of claim 24 , wherein the spreading process comprises:
(a) disposing a first volume of liquid material on the patterned template to form a layer of liquid material on the patterned template; and
(b) drawing an implement across the layer of liquid material to:
(i) remove a second volume of liquid material from the layer of liquid material on the patterned template; and
(ii) leave a third volume of liquid material on the patterned template.
26. The method of claim 1 , wherein the contacting of the patterned template surface with the first substrate displaces essentially all of the disposed liquid material from between the patterned template surface and the first substrate.
27. The method of claim 1 , wherein the treating of the liquid material comprises a process selected from the group consisting of a thermal process, a photochemical process, and a chemical process.
28. The method of claim 1 , further comprising, after (b) and before (c):
(b1) reducing the volume of the liquid material disposed in the plurality of recessed areas by one of:
(i) applying a contact pressure to the patterned template surface; and
(ii) allowing a second volume of the liquid to evaporate or permeate through the template;
(b2) removing the contact pressure applied to the patterned template surface; and
(b3) introducing gas within the recessed areas of the patterned template surface.
29. The method of claim 1 , comprising harvesting or collecting the nanoparticles.
30. The method of claim 29 , wherein the harvesting or collecting of the nanoparticles comprises a process selected from the group consisting of scraping with a medical scalpel, a brushing process, a dissolution process, an ultrasound process, a megasonics process, an electrostatic process, and a magnetic process.
31. The method of claim 1 , wherein the method comprises a batch process.
32. The method of claim 31 , wherein the batch process is selected from one of a semi-batch process and a continuous batch process.