IP Library Granted Patent US 8,276,269
Granted Patent B2
US 8,276,269 · App. 12/214,700 · Granted Oct 2, 2012

Dual epoxy dielectric and photosensitive solder mask coatings, and processes of making same

Assignee: Intel Corporation
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Quick Facts
Patent No.
US 8,276,269
App. No.
12/214,700
Granted
Oct 2, 2012
Kind
B2
Abstract

A microelectronic device mounting substrate includes a bond pad with a side wall and an upper surface. A dielectric first layer is disposed on the mounting substrate and a solder mask second layer is disposed on the dielectric first layer. A uniform recess is disposed through the solder mask second layer and the dielectric first layer that exposes the portion of the bond pad upper surface.

Claims (79)

1. A process comprising:

adhering a dielectric first layer to a mounting substrate upper surface, wherein the dielectric first layer contacts a bond pad at a sidewall thereof and a bond pad upper surface thereof;

adhering a solder mask second layer to the dielectric first layer; and

forming a recess simultaneously through the solder mask second layer and the dielectric first layer to expose a fraction of the bond pad upper surface.

2. The process of claim 1 , wherein the dielectric first layer covers a trace disposed on the mounting substrate upper surface.

3. The process of claim 1 , wherein the solder mask second layer is photosensitive, the process further including curing the solder mask second layer before forming the recess.

4. The process of claim 1 , wherein adhereing the dielectric first layer to the mounting substrate upper surface includes spin-on coating the dielectric first layer to the upper surface to a first thickness, wherein the bond pad sidewall includes a second thickness, and wherein the first thickness is greater than the second thickness.

5. The process of claim 1 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer; and

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad.

6. The process of claim 1 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad; and

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning.

7. The process of claim 1 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad;

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning; and

forming a solder bump on the bond pad upper surface.

8. The process of claim 1 , wherein the dielectric first layer is a dielectric upper first layer disposed on an upper surface of the mounting substrate, wherein the mounting substrate is a folded flexible mounting substrate including the upper surface and a lower surface, the process further including:

adhering a dielectric first lower layer to the mounting substrate lower surface;

adhering a solder mask lower second layer to the dielectric lower first layer;

forming a recess simultaneously through the solder mask lower second layer and the dielectric lower first layer to expose a fraction of a bond pad upper surface disposed on the lower surface; and

folding the folded flexible mounting substrate.

9. The process of claim 8 , wherein the solder mask lower second layer is a photo-sensitive material, the process further including:

curing the solder mask lower second layer; and

forming the recess by laser ablation through the solder mask lower second layer and the dielectric lower first layer to expose the bond pad.

10. The process of claim 8 , wherein the solder mask lower second layer is a photo-sensitive material, the process further including:

curing the solder mask lower second layer;

forming the recess by laser ablation through the solder mask lower second layer and the dielectric lower first layer to expose the bond pad; and

roughening the solder mask lower second layer by at least one process selected from desmearing and plasma cleaning.

11. A process comprising:

adhering a dielectric first layer to a mounting substrate upper surface by spin-on coating the dielectric first layer to the mounting substrate upper surface, wherein the dielectric first layer is in a thickness range from 6 μm to 12 μm, wherein the dielectric first layer contacts, disposed on the upper surface:

a first bond pad at a sidewall thereof and a bond pad upper surface thereof;

a first trace spaced apart and adjacent the first bond pad;

a second bond pad at a sidewall thereof and a second bond pad upper surface; and

a second trace spaced apart and adjacent the first bond pad;

adhering a solder mask second layer to the dielectric first layer;

forming a recess simultaneously through the solder mask second layer and the dielectric first layer by laser ablation to expose a fraction of the first bond pad upper surface and the second bond pad upper surface.

12. The process of claim 11 , wherein the solder mask second layer is photosensitive, the process further including curing the solder mask second layer before forming the recess.

13. The process of claim 11 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer; and

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad.

14. The process of claim 11 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad; and

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning.

15. The process of claim 11 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning; and

forming a solder bump on the bond pad upper surface.

16. A process comprising:

adhering a dielectric first layer to a mounting substrate upper surface by spin-on coating the dielectric first layer to the mounting substrate upper surface, wherein the dielectric first layer is a dielectric upper first layer disposed on an upper surface of the mounting substrate, wherein the mounting substrate is a folded flexible mounting substrate including the upper surface and a lower surface, wherein the dielectric first layer is in a thickness range from 6 μm to 12 μm, wherein the dielectric first layer contacts, disposed on the upper surface:

a first bond pad at a sidewall thereof and a bond pad upper surface thereof;

a first trace spaced apart and adjacent the first bond pad;

a second bond pad at a sidewall thereof and a second bond pad upper surface; and

a second trace spaced apart and adjacent the first bond pad;

adhering a solder mask second layer to the dielectric first layer; forming a recess simultaneously through the solder mask second layer and the dielectric first layer by laser ablation to expose a fraction of the first bond pad upper surface and the second bond pad upper surface;

adhering a dielectric first lower layer to the mounting substrate lower surface;

adhering a solder mask lower second layer to the dielectric lower first layer;

forming a recess simultaneously through the solder mask lower second layer and the dielectric lower first layer to expose a fraction of a bond pad upper surface disposed on the lower surface;

assembling a first integrated circuit (IC) to the first bond pad and the second bond pad;

folding the folded flexible mounting substrate; and

assembling a second IC to the mounting substrate lower surface, but above the first IC on the upper surface.

17. The process of claim 16 , wherein the solder mask lower second layer is a photo-sensitive material, the process further including:

curing the solder mask lower second layer; and

forming the recess by laser ablation through the solder mask lower second layer and the dielectric lower first layer to expose the bond pad.

18. The process of claim 16 , wherein the solder mask second layer is photosensitive, the process further including curing the solder mask second layer before forming the recess.

19. The process of claim 16 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer; and

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad.

20. The process of claim 16 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

forming the recess by laser ablation through the solder mask second layer and the dielectric first layer to expose the bond pad; and

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning

21. The process of claim 16 , wherein the solder mask second layer is a photo-sensitive material, the process further including:

curing the solder mask second layer;

roughening the solder mask second layer by at least one process selected from desmearing and plasma cleaning; and

forming a solder bump on the bond pad upper surface.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 15, 2011
From: JOMAA, HOUSSAM; BCHIR, OMAR J.
To: INTEL CORPORATION
Reel/Frame 027231/0866 →
Continuity (1)
Related Publication 20090314538A1 · Dec 24, 2009