Manufacturing method for a thin film transistor-liquid crystal display having an insulating layer exposing portions of a gate island
View Patent ↗A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.
1. A manufacturing method of a pixel unit of a TFT-LCD array substrate, comprising the steps of:
depositing sequentially on a substrate stacked layers of a gate metal layer, a first gate insulating layer, an active layer, and an ohmic contact layer, and then patterning the stacked layers to form a gate island;
depositing sequentially a second insulating layer and a pixel electrode material layer on the substrate, patterning the second insulating layer and the pixel electrode material layer, so as to form an opening on the gate island to expose the ohmic contact layer in a source region, a drain region, and a channel region of the TFT and form a pixel electrode;
depositing a source/drain metal layer on the substrate, and patterning the source/drain metal layer and the ohmic contact layer exposed in the opening, so as to form on the second insulating layer a source electrode connected with the ohmic contact layer in the source region and a drain electrode connected with the ohmic contact layer in the drain region, and remove the ohmic contact layer on the channel region; and
depositing a passivation layer on the substrate.
2. The manufacturing method according to claim 1 , wherein the passivation layer on the pixel electrode is removed to expose the pixel electrode.
3. The manufacturing method according to claim 1 , wherein during patterning the pixel electrode layer, the pixel electrode material layer is left in a source electrode forming region and a drain electrode forming region on the second insulating layer, so as to form the source electrode and the drain electrode on the pixel electrode material layer.
4. The manufacturing method according to claim 1 , wherein the source/drain metal layer is patterned with a first gray tone mask.
5. The manufacturing method according to claim 4 , wherein patterning with the first gray tone mask comprises the steps of:
forming a first photoresist layer on the source/drain metal layer;
exposing and developing the first photoresist layer with the first gray tone mask to form a first gray tone photoresist pattern, comprising a first full photoresist region that comprises a pixel electrode forming region, a first photoresist-free region that comprises a channel forming region, and a first partial photoresist region that comprises a source electrode forming region, a source forming region, a drain electrode forming region, and a drain forming region; and
etching the source/drain metal layer.
6. The manufacturing method according to claim 5 , further comprises:
processing the first gray tone photoresist pattern after etching the source/drain metal layer to completely remove the photoresist in the first partial photoresist region and reduce the thickness of the photoresist in the first full photoresist region;
depositing the passivation layer on the substrate, and lifting off the remaining first photoresist pattern to remove the passivation layer thereon; and
etching the exposed source/drain metal layer to expose the pixel electrode.