Nanoimprint resist, nanoimprint mold and nanoimprint lithography
View Patent ↗A nanoimprint resist includes a hyperbranched polyurethane oligomer (HP), a perfluoropolyether (PFPE), a methylmethacrylate (MMA), and a diluent solvent. A method of a nanoimprint lithography is also provided.
1. A nanoimprint resist comprising:
a hyperbranched polymer oligomer (HP), the HP is polymerized by a copolymerization of a trimellitic anhydride, an ethylene glycol, and an epoxy acrylic acid copolymer, or polymerized by a ring-opening copolymerization of an epoxy acrylic acid and an ethylene mercaptan;
a perfluoropolyether (PFPE);
a methylmethacrylate (MMA); and
a diluent solvent.
2. The nanoimprint resist of claim 1 , wherein a chemical structure HP is:
3. The nanoimprint resist of claim 1 , wherein the diluent solvent is 2-hydroxyethyl methacrylate or 2-Hydroxy Ethyl 2-methyl ethylene.
4. The nanoimprint resist of claim 1 , wherein a weight percent of the HP is in a range from about 50 wt % to about 60 wt %, a weight percent of the PFPE is in a range from about 3 wt % to about 5 wt %, a weight percent of the MMA is in a range from about 5 wt % to about 10 wt %, and a weight percent of the diluents solvent is in a range from about 25 wt % to about 35 wt %.
5. The nanoimprint resist of claim 4 , wherein the nanoimprint resist further comprises a polydimethlsiloxanes (PDMS) or methacrylatesilane with a weight percent in a range from about 5% to about 10%.
6. The nanoimprint resist of claim 4 , wherein the nanoimprint resist further comprises an initiator with a weight percent in a range from about 0.1% to about 2%.